The influence of fabrication governed surface conditions on the mechanical strength of thin film materials

Materials Research Society Symposium - Proceedings

Volumn 657, Issue , 2001, Pages

  Chasiotis, Ioannis ^a   Knauss, Wolfgang G ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; DEGRADATION; ELASTIC MODULI; FRACTURE TOUGHNESS; GRAIN BOUNDARIES; HYDROFLUORIC ACID; POLYSILICON; POROSITY; STRENGTH OF MATERIALS; SURFACE ROUGHNESS;

MICROTENSILE TESTING;

THIN FILMS;

EID: 0035557132     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)