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Advanced Functional Materials

Volumn 17, Issue 14, 2007, Pages 2522-2527

Chemical amplification of a triphenylene molecular electron beam resist

(5) Zaid, Hasnah Mohd a Robinson, Alex P G a Palmer, Richard E a Manickam, Mayandithevar a Preece, Jon A a

a UNIVERSITY OF BIRMINGHAM (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFICATION; CARBON; DURABILITY; LITHOGRAPHY; MOLECULAR STRUCTURE; OPTICAL RESOLVING POWER;

ETCH DURABILITY; LITHOGRAPHIC RESOLUTION; POLYMERIC COMPOUNDS; TRIPHENYLENE MOLECULAR ELECTRON BEAM RESISTS;

ELECTRON BEAMS;

EID: 34948875728 PISSN: 1616301X EISSN: 16163028 Source Type: Journal
DOI: 10.1002/adfm.200600653 Document Type: Article

Times cited : (21)

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