Chemical amplification resists: History and development within IBM

IBM Journal of Research and Development

Volumn 41, Issue 1-2, 1997, Pages 69-80

  Ito, H ^a,b,c,d,e,f  

^a IBM ALMADEN RESEARCH CENTER   (United States)

^b UNIVERSITY OF TOKYO   (Japan)

^c SUNY UPSTATE MEDICAL UNIVERSITY   (United States)

^d IBM   (United States)

^e Society of Polymer Science   (Japan)

^f Japan of Mechanical Engineers   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

RANDOM ACCESS STORAGE; SEMICONDUCTOR DEVICE MANUFACTURE;

CHEMICAL AMPLIFICATION RESISTS; DYNAMIC RANDOM ACCESS MEMORY (DRAM);

PHOTORESISTS;

EID: 0030714728     PISSN: 00188646     EISSN: None     Source Type: Journal    
DOI: 10.1147/rd.411.0069     Document Type: Article

References (60)

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