Characterization of FD SOI devices and VCO's on thin dielectric membranes under pressure

Solid-State Electronics

Volumn 51, Issue 9, 2007, Pages 1229-1237

  Olbrechts, B ^a   Rue, B ^a   Suski, J ^b   Flandre, D ^a   Raskin, J P ^a  

^a UNIVERSITÉ CATHOLIQUE DE LOUVAIN   (Belgium)

^b MEMSFIELD   (France)

Author keywords

Bulk micromachining; Devices on membrane; Pressure sensors; Ring oscillators; Silicon on insulator MOSFETs

Indexed keywords

COMPUTER SIMULATION; DIELECTRIC DEVICES; DRAIN CURRENT; FINITE ELEMENT METHOD; MICROMACHINING; NATURAL FREQUENCIES; PRESSURE EFFECTS; PRESSURE SENSORS; SILICON ON INSULATOR TECHNOLOGY; VARIABLE FREQUENCY OSCILLATORS;

BULK MICROMACHINING; DIELECTRIC MEMBRANES; RING OSCILLATORS;

MOSFET DEVICES;

EID: 34548552966     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2007.07.026     Document Type: Article

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