Flexible membrane pressure sensor

Sensors and Actuators, A: Physical

Volumn 119, Issue 2, 2005, Pages 332-335

  Lim, H C ^a   Schulkin, B ^a   Pulickal, M J ^a   Liu, S ^a   Petrova, R ^a   Thomas, G ^a   Wagner, S ^b   Sidhu, K ^c   Federici, J F ^a  

^a NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

^b PRINCETON UNIVERSITY   (United States)

^c American Sensor Technology Inc   (United States)

Author keywords

Flexible substrate; Membrane; Pressure sensor

Indexed keywords

ELECTRIC CONDUCTIVITY; PIEZOELECTRIC DEVICES; POLYSILICON; PRESSURE EFFECTS; SILICA; SILICON WAFERS; THIN FILMS;

FLEXIBLE MEMBRANES; FLEXIBLE SUBSTRATE; PRESSURE SENSORS; SILICON SUBSTRATES;

SENSORS;

EID: 17044385029     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.10.012     Document Type: Article

References (11)

1. E. Defaÿ, C. Millon, C. Malhaire, and D. Barbier PZT thin film integration for the realization of a high sensitivity pressure microsensor based on a vibrating membrane Sens. Actuators A 99 2002 64 67
2. C. Malhaire, and D. Barbier Design of a polysilicon-on-insulator pressure sensor with original polysilicon layout for harsh environment Thin Solid Film 427 2003 362 366
3. I. Obieta, E. Castano, and F.J. Gracia High-temperature polysilicon pressure microsensor Sens. Actuators A 46-47 1995 161 165
4. V. Stankevic, and C. Simkevicius Application of aluminum films as temperature sensors for the compensation of output thermal shift of silicon piezoresistive pressure sensors Sens. Actuators A 71 1998 161 166
5. A. Kuoni, R. Holzherr, M. Boillat, and N. Rooij Polyimide membrane with ZnO piezoelectric thin film pressure transducer as a differential pressure liquid flow sensor J. Micromech. Microeng. 13 2003 103 107
6. C. Csaszar, G. Harsányi, and R.P. Agarwal A very low-cost pressure sensor with extremely high sensitivity Sens. Actuators A 41-42 1994 417 420
7. S.P. Timoshenko, and S. Woinowsky-Krieger Theory of Plates and Shells second ed. 1959 McGraw-Hill NY
8. W.B. Bickford A First Course in the Finite Element Method 1990 Irwin Boston Chapter 3, pp. 215-406
9. R.D. Cook, D.S. Malkus, M.E. Plesha, Concepts and Applications of Finite Element Analysis, fourth ed., John Wiley, NY, 2001. Chapter 2, pp. 36-46, Chapter 3, pp. 95-96, Chapter 5, pp. 179-193, Chapter 6, 202-240, Chapter 8, pp. 271-278, Chapter 15, pp. 530-547, Chapter 16, pp. 561-583, Chapter 17, pp. 602-609.
10. T.J.R. Hughes, The Finite Element Method, Prentice Hall, Englewood Cliffs, NJ, 1987, Chapter 1, pp. 40-44, Chapter 2, pp. 57-90, Chapter 4, pp. 185-192, pp. 215-217, Chapter 5, pp. 310-324, pp. 374-376, Chapter 6, pp. 383-414.
11. K. Wan, S. Guo, and D.A. Dillard A theoretical and numerical study of a thin clamped circular film under an external load in the presence of a tensile residual stress Thin Solid Film 425 2003 150 162