Design of smart piezoresistive pressure sensor

5th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2001

Volumn 1, Issue , 2001, Pages 202-205

  Jung, Hu Min ^a   Cho, Sang Bock ^a   Lee, Jong Hwa ^a  

^a University of Ulsan   (South Korea)

Author keywords

CMOS; silicon diaphragm; smart pressure sensor

Indexed keywords

ANALOG INTEGRATED CIRCUITS; CMOS INTEGRATED CIRCUITS; DIAPHRAGMS; INTEGRATED CIRCUIT DESIGN; OPERATIONAL AMPLIFIERS; PRESSURE SENSORS; PRODUCT DESIGN; RECONFIGURABLE HARDWARE; SPICE; STRESSES;

DOUBLE-POLY DOUBLE-METAL CMOS PROCESS; MECHANICAL STRESS; OUTPUT CHARACTERISTICS; OUTPUT VOLTAGES; PIEZORESISTIVE PRESSURE SENSORS; SILICON DIAPHRAGM; TEMPERATURE COMPENSATION; WHEATSTONE BRIDGES;

ANALOG TO DIGITAL CONVERSION;

EID: 84961768990     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/KORUS.2001.975100     Document Type: Conference Paper

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