Mechanical characterization of thermal flow sensors membranes

Sensors and Actuators, A: Physical

Volumn 125, Issue 2, 2006, Pages 260-266

  Sabate N ^a   Gracia I ^b,c   Santander, J ^b,d   Fonseca, L ^b   Figueras, E ^b,e   Cane C ^b   Morante, J R ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^c Microsystems Department

^d Electrical Characterization Laboratory

^e Microsystems and Silicon Technologies Department

Author keywords

Micromachined membranes; Residual stress; Thermal stress; Young modulus

Indexed keywords

MICROMACHINED MEMBRANES; SENSORS MEMBRANES; THERMAL FLOW SENSORS;

ATMOSPHERIC TEMPERATURE; ELASTIC MODULI; MEMBRANES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RESIDUAL STRESSES; TEMPERATURE MEASUREMENT; THERMAL STRESS; THIN FILMS;

SENSORS;

EID: 29144452418     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.07.024     Document Type: Article

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