A silicon piezoresistive pressure sensor

Proceedings - 1st IEEE International Workshop on Electronic Design, Test and Applications, DELTA 2002

Volumn , Issue , 2002, Pages 181-184

  Singh, Ranjit ^a   Ngo, Low Lee ^a   Seng, Ho Soon ^a   Mok, Frederick Neo Chwee ^b  

^a SINGAPORE POLYTECHNIC   (Singapore)

^b Nanyang Technological University 50 Nanyang Avenue   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BRIDGE CIRCUITS; DIAPHRAGMS; FABRICATION; PRESSURE SENSORS; PRODUCT DESIGN;

ANSYS SOFTWARE; FABRICATED SENSORS; LOW TEMPERATURE SENSITIVITY; PIEZORESISTOR; SILICON PIEZORESISTIVE; SILICON PRESSURE SENSORS; VOLTAGE SENSITIVITY; WHEATSTONE BRIDGES;

SILICON;

EID: 77957905885     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DELTA.2002.994611     Document Type: Conference Paper

References (6)

1. S.M. Sze,. .Semiconductor Sensors. John Willey & Sons, pp160-189. 1994.
2. Bicking, R.E. .Fundamentals of Pressure Sensor Technology., Sensors, Vol 30, 1998.
3. Shankland, E.P, .Piezoresistive Silicon Pressure Sensors., Sensors, Vol 22, Aug. 1991.
4. Herring,.Transport properties of many-valley semiconductor. Bell System Technology Journal, Vol 34, No. 2, pp. 237-290, 1955.
5. C. Smith, .Piezoresistance effect in Ge and Si., Physics Review, Vol. 94, pp 248, Feb 1936.
6. O. Tufte, P Chapman and D. Long, . Silicon diffused-element piezoresistive diaphragms., J. of Applied Physics, Vol. 33, No. 11, pp3322-3327, Nov. 1962.