Residual stress influences on the sensitivity of ultrasonic sensor having composite membrane structure

Sensors and Actuators, A: Physical

Volumn 125, Issue 2, 2006, Pages 242-248

  Lee, Seungmock ^a   Tanaka, Tsunehisa ^a   Inoue, Koji ^a  

^a OSAKA MUNICIPAL TECHNICAL RESEARCH INSTITUTE   (Japan)

Author keywords

Membrane; PZT film; Sensitivity; Stress; Ultrasonic sensor

Indexed keywords

ACOUSTIC PROPERTIES; COMPOSITE MATERIALS; ELASTICITY; ELECTRIC POTENTIAL; HEAT TREATMENT; MEMBRANES; RESIDUAL STRESSES; SILICON; TENSILE STRESS; THERMODYNAMIC PROPERTIES; ULTRASONIC DEVICES;

COMPOSITE MEMBRANES; PZT FILM; SENSITIVITY; ULTRASONIC SENSORS;

SENSORS;

EID: 29144503744     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.08.011     Document Type: Article

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