SCOPUS 정보 검색 플랫폼

Proceedings of IEEE Sensors

Volumn 2, Issue 1, 2003, Pages 698-703

Combined Differential and Relative Pressure Sensor based on a Double-Bridged Structure

(5) Pedersen, C a Jespersen, S T b Krog, J P a Christensen, C a Thomson, E V b

a Grundfos DK AS (Denmark)

b TECHNICAL UNIVERSITY OF DENMARK (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; APPROXIMATION THEORY; CALIBRATION; COMPUTER SIMULATION; ERROR ANALYSIS; ETCHING; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; RESISTORS; STRESS ANALYSIS;

PRESSURE SENSORS; SENSOR STRESS DISTRIBUTIONS;

SENSORS;

EID: 1542273518 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (5)

References (8)

1
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- Temperature compensation of piezoresistive pressure sensors
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- Akbar, M.¹ Shanblatt, M.A.²

2
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- Self-compensating piezoresistive pressure sensor
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- Dziuban, J.J.¹ Grecka-Drzazga, A.² Lipowicz, U.³ Indyka, W.⁴

3
- 0029510971
- Compensation method of offset and its temperature drift in silicon piezoresistive pressure sensor using double Wheatstone-bridge configuration
- Young-Tae Lee and Hee-Don Seo, Compensation method of offset and its temperature drift in silicon piezoresistive pressure sensor using double Wheatstone-bridge configuration, Proc. of Transducers'95, Vol.2, 1995, p. 570
- (1995) Proc. of Transducers'95 , vol.2 , pp. 570
- Lee, Y.-T.¹ Seo, H.-D.²

4
- 1542268804
- Grundfos. Pressure sensor or differential pressure sensor. Patent EP00801293B1
- Grundfos. Pressure sensor or differential pressure sensor. Patent EP00801293B1.

5
- 1542358629
- Portugal
- C. Pedersen, S. T. Jespersen, J. P. Krog, K. W. Jacobsen, C. Christensen and E. V. Thomsen, Characterization of MEMS Pressure Sensor Packaging Concept using O-rings as Hermetic Sealing, Eurosensors XVII, Portugal, 2003
- (2003) Characterization of MEMS Pressure Sensor Packaging Concept Using O-rings as Hermetic Sealing, Eurosensors XVII
- Pedersen, C.¹ Jespersen, S.T.² Krog, J.P.³ Jacobsen, K.W.⁴ Christensen, C.⁵ Thomsen, E.V.⁶

6
- 0032687815
- Tantalum oxide thin films as protective coating for sensors
- USA
- C. Christensen, R. de Reus and S. Bouwstra, Tantalum oxide thin films as protective coating for sensors, MEMS'99, USA, 1999, p. 267
- (1999) MEMS'99 , pp. 267
- Christensen, C.¹ De Reus, R.² Bouwstra, S.³

7
- 0032083807
- Reliability of industrial packaging for microsystems
- R. de Reus, C. Christensen, S. Weichel, S. Bouwstra, J. Janting, G. Friis Eriksen, K. Dyrbye, T. Romedahl Brown, J. P. Krog, O. Sndergrd Jensen and P. Graversen, Reliability of industrial packaging for microsystems, Microelectronics Reliability, 38 (1998) p. 1251
- (1998) Microelectronics Reliability , vol.38 , pp. 1251
- De Reus, R.¹ Christensen, C.² Weichel, S.³ Bouwstra, S.⁴ Janting, J.⁵ Friis Eriksen, G.⁶ Dyrbye, K.⁷ Romedahl Brown, T.⁸ Krog, J.P.⁹ Sndergrd Jensen, O.¹⁰ Graversen, P.¹¹

8
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- Properties of silicon
- ISBN: 0852964757
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.