SOI-CMOS compatible low-power gas sensor using sputtered and drop-coated metal-oxide active layers

Microsystem Technologies

Volumn 12, Issue 1-2 SPEC. ISS., 2005, Pages 160-168

  Ivanov, P ^a   Laconte, J ^b   Raskin, J P ^b   Stankova, M ^a   Sotter, E ^a   Llobet, E ^a   Vilanova, X ^a   Flandre, D ^b   Correig, X ^a  

^a UNIVERSITAT ROVIRA I VIRGILI   (Spain)

^b UNIVERSITÉ CATHOLIQUE DE LOUVAIN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; MICROELECTROMECHANICAL DEVICES; OXIDES; POLYSILICON; SILICON ON INSULATOR TECHNOLOGY; SPUTTERING; THIN FILMS;

ACTIVE LAYERS; DROP COATINGS; MICROHEATERS; SMART GAS SENSORS;

CHEMICAL SENSORS;

EID: 30344470502     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-005-0003-0     Document Type: Conference Paper

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