High-power GDPP Z-pinch EUV source technology

EUV Sources for Lithography

Volumn , Issue , 2006, Pages 413-452

  Stamm, Uwe ^a   Schriever, Guido ^a   Kleinschmidt, Jürgen ^a  

^a XTREME Technologies   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EXTREME ULTRAVIOLET LITHOGRAPHY;

EUV SOURCE; HIGH POWER; Z PINCH;

LIGHT SOURCES;

EID: 34548041809     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1117/3.613774.Ch14     Document Type: Chapter

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