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Volumn 215, Issue 12, 2001, Pages 1575-1599
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The development of excimer laser technology - History and future prospects
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Author keywords
Dye Laser; Excimer Laser; Lithography; Micromachining; Ultraviolet
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Indexed keywords
DYE LASERS;
EXCIMER LASERS;
FUSED SILICA;
INDUSTRIAL RESEARCH;
LITHOGRAPHY;
MICROMACHINING;
PUMPING (LASER);
RESEARCH LABORATORIES;
ULTRAVIOLET LASERS;
APPLICATION REQUIREMENTS;
HISTORICAL DEVELOPMENT;
HISTORY AND FUTURE;
NATIONAL LABORATORY;
PULSED POWER MODULES;
SPECTRAL BANDWIDTH;
TECHNOLOGICAL DEVELOPMENT;
ULTRAVIOLET;
PULSED LASERS;
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EID: 0041758987
PISSN: 09429352
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (14)
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References (3)
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