Power scaling of a Z-pinch extreme ultraviolet source

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3997, Issue , 2000, Pages 861-866

  McGeoch, Malcolm W ^a  

^a PLEX LLC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRODES; MIRRORS; ULTRAVIOLET RADIATION; XENON;

EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL); Z-PINCH SOURCES;

PHOTOLITHOGRAPHY;

EID: 0033699058     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)