SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Wuji Cailiao Xuebao/Journal of Inorganic Materials

Volumn 22, Issue 3, 2007, Pages 385-390

Recent advances in synthesis and properties of cubic boron nitride films

(3) Zhang, Xing Wang a You, Jing Bi a Chen, Nuo Fu a

a INSTITUTE OF SEMICONDUCTORS (China)

Author keywords

Adhesion; Cubic boron nitride (c BN) films; Heteroepitaxy; Stress

Indexed keywords

ADHESION; CHEMICAL PROPERTIES; CRYSTALLINE MATERIALS; EPITAXIAL GROWTH; MICROSTRUCTURE; PHYSICAL PROPERTIES; SYNTHESIS (CHEMICAL); THIN FILMS;

CUBIC BORON NITRIDE (C-BN) FILMS; HETEROEPITAXY; STRESS;

CUBIC BORON NITRIDE;

EID: 34250310441 PISSN: 1000324X EISSN: None Source Type: Journal
DOI: None Document Type: Review

Times cited : (10)

References (43)

1
- 0031339504
- Mirkarimi P B, McCarty K F, Medlin D L. Mater. Set. Eng. R, 1997, 21: 47-100.
- (1997) Mater. Set. Eng. R , vol.21 , pp. 47-100
- Mirkarimi, P.B.¹ McCarty, K.F.² Medlin, D.L.³

2
- 0023649268
- Mishima O, Tanaka J, Yamaoka S, et al. Science, 1987, 238: 181-183.
- (1987) Science , vol.238 , pp. 181-183
- Mishima, O.¹ Tanaka, J.² Yamaoka, S.³

3
- 0001405179
- Sokolowski M. J. Crystal Growth, 1979, 46: 136-138.
- (1979) J. Crystal Growth , vol.46 , pp. 136-138
- Sokolowski, M.¹

4
- 0034445879
- Zhang xing-wang, et al. Journal of Inorganic Materials, 2000, 15(4): 577-583.
- (2000) Journal of Inorganic Materials , vol.15 , Issue.4 , pp. 577-583
- Zhang, X.-W.¹

5
- 3142552836
- Kulisch W, Reinke S. Diamond Films Technol., 1997, 7: 105-138.
- (1997) Diamond Films Technol. , vol.7 , pp. 105-138
- Kulisch, W.¹ Reinke, S.²

6
- 0025434204
- Okamoto M, Yokoyama H, Osaka Y. Jpn. J. Appl. Phys., 1990, 29: 930-933.
- (1990) Jpn. J. Appl. Phys. , vol.29 , pp. 930-933
- Okamoto, M.¹ Yokoyama, H.² Osaka, Y.³

7
- 0034516698
- Yamamoto K, Keunecke M, Bewilogua K. Thin Solid Films, 2000, 377/378: 331-339.
- (2000) Thin Solid Films , vol.377-378 , pp. 331-339
- Yamamoto, K.¹ Keunecke, M.² Bewilogua, K.³

8
- 10044272003
- Bewilogua K, Keunecke M, Weigel K, et al. Thin Solid Films, 2004, 469/470: 86-91.
- (2004) Thin Solid Films , vol.469-470 , pp. 86-91
- Bewilogua, K.¹ Keunecke, M.² Weigel, K.³

9
- 0000817854
- Boyen H G, Widmayer P, Schwertberger D, et al. Appl. Phys. Lett., 2000, 76: 709-711.
- (2000) Appl. Phys. Lett. , vol.76 , pp. 709-711
- Boyen, H.G.¹ Widmayer, P.² Schwertberger, D.³

10
- 79956017369
- Fitz C, Kolitsch A, Moller W, et al. Appl. Phys. Lett., 2001, 80: 55-57.
- (2001) Appl. Phys. Lett. , vol.80 , pp. 55-57
- Fitz, C.¹ Kolitsch, A.² Moller, W.³

11
- 0033707202
- Matsumoto S, Zhang W J. Jpn. J. Appl. Phys., 2000, 39: L442-L444.
- (2000) Jpn. J. Appl. Phys. , vol.39
- Matsumoto, S.¹ Zhang, W.J.²

12
- 0037508553
- Chan C Y, Zhang W J, Meng X M, et al. Diamond Relat. Mater., 2003, 12: 1162-1168.
- (2003) Diamond Relat. Mater. , vol.12 , pp. 1162-1168
- Chan, C.Y.¹ Zhang, W.J.² Meng, X.M.³

13
- 3042608055
- Yu J, Matsumoto S. Diamond Relat. Mater., 2004, 13: 1704-1708.
- (2004) Diamond Relat. Mater. , vol.13 , pp. 1704-1708
- Yu, J.¹ Matsumoto, S.²

14
- 0035476397
- Feldermann H, Ronning C, Hofsass H, et al. J. Appl. Phys., 2001, 90: 3248-3254.
- (2001) J. Appl. Phys. , vol.90 , pp. 3248-3254
- Feldermann, H.¹ Ronning, C.² Hofsass, H.³

15
- 0032620444
- Lux B, Kalss W, Haubner R, et al. Diamond Relat. Mater., 1999, 8: 415-422.
- (1999) Diamond Relat. Mater. , vol.8 , pp. 415-422
- Lux, B.¹ Kalss, W.² Haubner, R.³

16
- 21844489067
- Kester D J, Ailey K S, Lichtenwalner D J, et al. J. Vac. Sci. Technol. A, 1994, 12: 3074-3081.
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 3074-3081
- Kester, D.J.¹ Ailey, K.S.² Lichtenwalner, D.J.³

17
- 0039803536
- Otano-Rivera W, Pilione L J, Zapien J A, et al. J. Vac. Sci. Technol. A, 1998, 16: 1331-1335.
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 1331-1335
- Otano-Rivera, W.¹ Pilione, L.J.² Zapien, J.A.³

18
- 0032620792
- Pascallon J, Stambouli V, Ilias S, et al. Diamond Relat. Mater., 1999, 8: 325-330.
- (1999) Diamond Relat. Mater. , vol.8 , pp. 325-330
- Pascallon, J.¹ Stambouli, V.² Ilias, S.³

19
- 0141819201
- Zhang X W, Boyen H G, Deyneka N, et al. Nature Mater., 2003, 2: 312-315.
- (2003) Nature Mater. , vol.2 , pp. 312-315
- Zhang, X.W.¹ Boyen, H.G.² Deyneka, N.³

20
- 12344278801
- Zhang X W, Boyen H G, Ziemann P, et al. Appl. Phys. A, 2005, 80: 735-738.
- (2005) Appl. Phys. A , vol.80 , pp. 735-738
- Zhang, X.W.¹ Boyen, H.G.² Ziemann, P.³

21
- 19444367304
- Zhang W J, Bello I, Lifshtiz Y, et al. Adv. Mater., 2004, 16: 1405-1408.
- (2004) Adv. Mater. , vol.16 , pp. 1405-1408
- Zhang, W.J.¹ Bello, I.² Lifshtiz, Y.³

22
- 24944587923
- Zhang W J, Meng X M, Chan C Y, et al. J. Phys. Chem. B, 2005, 109: 16005-16010.
- (2005) J. Phys. Chem. B , vol.109 , pp. 16005-16010
- Zhang, W.J.¹ Meng, X.M.² Chan, C.Y.³

23
- 2442495119
- Zhang X W, Boyen H G, Ziemann P, et al. Diamond Relat. Mater., 2004, 13: 1144-1148.
- (2004) Diamond Relat. Mater. , vol.13 , pp. 1144-1148
- Zhang, X.W.¹ Boyen, H.G.² Ziemann, P.³

24
- 0031211578
- Mirkarimi P B, Medlin D L, McCarty K F, et al. J. Appl. Phys., 1997, 82: 1617-1625.
- (1997) J. Appl. Phys. , vol.82 , pp. 1617-1625
- Mirkarimi, P.B.¹ Medlin, D.L.² McCarty, K.F.³

25
- 0008117553
- Ziemann P, Boyen H G, Deyneka N, et al. Adv. Solid State Phys., 2000, 40: 423-430.
- (2000) Adv. Solid State Phys. , vol.40 , pp. 423-430
- Ziemann, P.¹ Boyen, H.G.² Deyneka, N.³

26
- 0037212073
- Chan C Y, Zhang W J, Matsumoto S, et al. J. Crystal Growth, 2003, 247: 438-444.
- (2003) J. Crystal Growth , vol.247 , pp. 438-444
- Chan, C.Y.¹ Zhang, W.J.² Matsumoto, S.³

27
- 4544234444
- Zhang W J, Bello I, Lifshitz Y, et al. Appl. Phys. Lett., 2004, 85: 1344-1346.
- (2004) Appl. Phys. Lett. , vol.85 , pp. 1344-1346
- Zhang, W.J.¹ Bello, I.² Lifshitz, Y.³

28
- 0026875935
- Oliver W C, Pharr G M. J. Mater. Res., 1992, 7: 1564-1583.
- (1992) J. Mater. Res. , vol.7 , pp. 1564-1583
- Oliver, W.C.¹ Pharr, G.M.²

29
- 33751280237
- Richter F, Herrmann M, Molnar F, et al. Surf. Coat. Technol, 2006, 201: 3577-3587.
- (2006) Surf. Coat. Technol , vol.201 , pp. 3577-3587
- Richter, F.¹ Herrmann, M.² Molnar, F.³

30
- 0000733217
- Ronning C, Banks A D, McCarson B L, et al. J. App Phys., 1998, 84: 5046-5051.
- (1998) J. App Phys. , vol.84 , pp. 5046-5051
- Ronning, C.¹ Banks, A.D.² McCarson, B.L.³

31
- 0034249464
- Zhang X W, Zou Y J, Yan H, et al. Mater. Lett., 2000 45: 111-115.
- (2000) Mater. Lett. , vol.45 , pp. 111-115
- Zhang, X.W.¹ Zou, Y.J.² Yan, H.³

32
- 0042378369
- Nose K, Tachibana K, Yoshida T. Appl. Phys. Lett., 2003 83: 943-945.
- (2003) Appl. Phys. Lett. , vol.83 , pp. 943-945
- Nose, K.¹ Tachibana, K.² Yoshida, T.³

33
- 0036467042
- Mohammad S N. Solid State Electron., 2002, 46: 203-222.
- (2002) Solid State Electron. , vol.46 , pp. 203-222
- Mohammad, S.N.¹

34
- 28944455695
- Samantaray C B, Singh R N. Inter. Mater. Rev., 2005 50: 313-344.
- (2005) Inter. Mater. Rev. , vol.50 , pp. 313-344
- Samantaray, C.B.¹ Singh, R.N.²

35
- 0032614044
- Chen G H, Zhang X W, Wang B, et al. Appl. Phys. Lett. 1999, 75: 10-12.
- (1999) Appl. Phys. Lett , vol.75 , pp. 10-12
- Chen, G.H.¹ Zhang, X.W.² Wang, B.³

36
- 21344472165
- Zhang X W, Yin H, Boyen H G, et al. Diamond Relat Mater., 2005, 14: 1482-1488.
- (2005) Diamond Relat Mater. , vol.14 , pp. 1482-1488
- Zhang, X.W.¹ Yin, H.² Boyen, H.G.³

37
- 0037217720
- Deyneka N, Zhang X W, Boyen H G, et al. Diamond Relat. Mater., 2003, 12: 37-46.
- (2003) Diamond Relat. Mater. , vol.12 , pp. 37-46
- Deyneka, N.¹ Zhang, X.W.² Boyen, H.G.³

38
- 0041766637
- Yang H S, Iwamoto C, Yoshida T. J. Appl. Phys., 2003, 94: 1248-1251.
- (2003) J. Appl. Phys. , vol.94 , pp. 1248-1251
- Yang, H.S.¹ Iwamoto, C.² Yoshida, T.³

39
- 21344456716
- Zhang X W, Boyen H G, Yin H, et al. Diamond Relat. Mater., 2005, 14: 1474-1481.
- (2005) Diamond Relat. Mater. , vol.14 , pp. 1474-1481
- Zhang, X.W.¹ Boyen, H.G.² Yin, H.³

40
- 0036841219
- Iwamoto C, Yang H S, Yoshida T. Diamond Relat. Mater., 2002, 11: 1854-1857.
- (2002) Diamond Relat. Mater. , vol.11 , pp. 1854-1857
- Iwamoto, C.¹ Yang, H.S.² Yoshida, T.³

41
- 79956057602
- Li Q, Bello I, Marks L D, et al. Appl. Phys. Lett., 2002, 80: 46-48.
- (2002) Appl. Phys. Lett. , vol.80 , pp. 46-48
- Li, Q.¹ Bello, I.² Marks, L.D.³

42
- 0036645357
- Li Q, Zhang R Q, Marks L D, et al. Diamond Relat. Mater., 2002, 11: 1416-1421.
- (2002) Diamond Relat. Mater. , vol.11 , pp. 1416-1421
- Li, Q.¹ Zhang, R.Q.² Marks, L.D.³

43
- 1842633387
- Deyneka N, Zhang X W, Boyen H G, et al. Diamond Relat. Mater., 2004, 13: 473-481.
- (2004) Diamond Relat. Mater. , vol.13 , pp. 473-481
- Deyneka, N.¹ Zhang, X.W.² Boyen, H.G.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.