Synthesis of thick and high quality cubic boron nitride films by r.f. bias assisted d.c. jet plasma chemical vapor deposition

Diamond and Related Materials

Volumn 13, Issue 9, 2004, Pages 1704-1708

  Yu, J ^a   Matsumoto, S ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Chemical vapor deposition; Cubic boron nitride; D.c. jet plasma; R.f. bias; Raman

Indexed keywords

CHEMICAL VAPOR DEPOSITION; PLASMA APPLICATIONS; RAMAN SPECTROSCOPY; SYNTHESIS (CHEMICAL); THIN FILMS;

CUBIC BORON NITRIDE (CBN); GROWTH TEMPERATURES;

BORON COMPOUNDS;

BORON NITRIDE; PLASMA JET;

EID: 3042608055     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.02.010     Document Type: Article

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