Structure, optical, and electrical properties of indium tin oxide thin films prepared by sputtering at room temperature and annealed in air or nitrogen

Journal of Applied Physics

Volumn 101, Issue 7, 2007, Pages

  Guillen C ^a   Herrero, J ^a  

^a CIEMAT   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CARRIER CONCENTRATION; ELECTRIC RESISTANCE; GLASS; HALL EFFECT; INDIUM COMPOUNDS; NITROGEN; OPACITY; PARTIAL PRESSURE; SPUTTERING; X RAY DIFFRACTION;

INDIUM TIN OXIDE; LATTICE DISTORTION; SODA-LIME GLASS;

THIN FILMS;

EID: 34247225549     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2715539     Document Type: Article

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