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Volumn 388, Issue 1-2, 2001, Pages 34-40

Investigations on the crystallisation properties of RF magnetron sputtered indium tin oxide thin films

(4) Thilakan, P a Minarini, C a Loreti, S a Terzini, E a

Author keywords

Characterization; Crystal growth; Indium tin oxide; RF magnetron sputtering; Thin film deposition; X Ray diffraction; X Ray texture

Indexed keywords

COMPOSITION EFFECTS; CRYSTAL GROWTH; CRYSTAL ORIENTATION; CRYSTALLIZATION; DEPOSITION; GLASS; MAGNETRON SPUTTERING; POLYCRYSTALLINE MATERIALS; SUBSTRATES; THIN FILMS; X RAY CRYSTALLOGRAPHY; X RAY DIFFRACTION ANALYSIS;

INDIUM TIN OXIDES; THIN FILM DEPOSITION; X-RAY TEXTURE ANALYSIS;

CONDUCTIVE FILMS;

EID: 0035372171 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)00820-3 Document Type: Article

Times cited : (92)

References (26)

1
- 0005347729
- (1995) Proceedings of the Thirteenth European Photovoltaic Solar Energy Conference , vol.1 , pp. 249
- Borchert, D.¹ Job, R.² Grabosch, G.³ Wolffersdorf, C.⁴ Fahrner, W.R.⁵

2
- 0031139951
- (1997) Appl. Surf. Sci. , vol.115 , pp. 96
- Wu, W.F.¹ Chiou, B.S.²

3
- 0001185306
- (1998) J. Appl. Phys. , vol.84 , pp. 6869
- Kim, J.S.¹ Granstrom, M.² Friend, R.H.³

4
- 0029321977
- (1995) J. Electron. Mater. , vol.20 , pp. 719
- Thilakan, P.¹ Kalainathan, S.² Kumar, J.³ Ramasamy, P.⁴

5
- 0020115402
- (1982) Appl. Phys. A , vol.27 , pp. 197
- Frank, G.¹ Kostlin, H.²

6
- 36449007112
- (1991) J. Appl. Phys. , vol.70 , pp. 3848
- Maruyama, T.¹ Fukui, K.²

7
- 0000517923
- (1996) Appl. Phys. , vol.68 , pp. 2663
- Sun, X.W.¹ Hung, H.C.² Kwok, H.S.³

8
- 0001022502
- (1997) J. Appl. Phys. , vol.82 , pp. 865
- Tahar, R.H.¹ Ban, T.² Ohya, Y.³ Takahashi, Y.⁴

9
- 0030142949
- (1996) Jpn. J. Appl. Phys. , vol.35 , pp. 2788
- Nishimura, E.¹ Ando, M.² Onisawa, K.³ Takabatake, M.⁴ Minemura, T.⁵

10
- 0019036589
- (1980) Thin Solid Films , vol.70 , pp. 91
- Mizuhshi, M.¹

11
- 0006750404
- (1989) J. Appl. Phys. , vol.65 , pp. 1270
- Kumar, C.V.R.V.¹ Mansigh, A.²

12
- 0029254409
- (1995) Jpn. J. Appl. Phys. , vol.34 , pp. 600
- Yi, C.H.¹ Yasui, I.² Shigesato, Y.³

13
- 0001320630
- (1994) Appl. Phys. Lett. , vol.64 , pp. 2712
- Kamei, M.¹ Yagami, T.² Takaki, S.³ Shigesato, Y.⁴

14
- 0029272270
- (1995) Jpn. J. Appl. Phys. , vol.34 , pp. 1638
- Yi, C.H.¹ Yasui, I.² Shigesato, Y.³

15
- 0031139442
- (1997) Vacuum , vol.48 , pp. 463
- Thilakan, P.¹ Kumar, J.²

16
- 0003392447
- John Wiley & Sons, New York
- (1974) X-Ray Diffraction Procedures
- Klug, H.P.¹ Alexander, L.E.²

17
- 0038619693
- (1974) J. Appl. Cryst. , vol.7 , pp. 286
- Gerits, H.¹ Rieck, G.D.²

18
- 0031386912
- (1997) Appl. Surf. Sci. , vol.120 , pp. 243
- Meng, L.J.¹ Santos, M.P.²

19
- 0005239860
- (1994) J. Appl. Phys. , vol.75 , pp. 2264
- Koorobov, V.¹ Shapira, Y.²

20
- 4243359487
- (1999) J. Cryst. Growth , vol.198-199 , pp. 682
- Jun, F.Y.¹ Shou, G.Z.² Min, L.J.³ Ping, L.Y.⁴ Hong, Z.⁵ Hua, J.M.⁶

21
- 0031163085
- (1997) Jpn. J. Appl. Phys. , vol.36 , pp. 3408
- Mizuno, M.¹ Miyamoto, T.² Ohnishi, T.³ Hayashi, H.⁴

22
- 0025521833
- (1990) Thin Solid Films , vol.192 , pp. 17
- Nagatomo, T.¹ Maruta, V.² Omoto, O.³

23
- 0005327708
- (1999) Jpn. J. Appl. Phys. , vol.38 , pp. 111
- Terzini, E.¹ Nobile, G.² Loreti, S.³ Minarini, C.⁴ Polichetti, T.⁵ Thilakan, P.⁶

24
- 0005239021
- (1992) J. Electrochem. Soc. , vol.139 , pp. 275
- Parent, Ph.¹ Dexpert, H.² Tourillon, G.³ Grimal, J.M.⁴

25
- 0005283998
- (1998) Jpn. J. Appl. Phys.7 , vol.27 , pp. 1088
- Matsuoka, T.¹ Kuwata, J.² Nisikawa, M.³ Fujita, Y.⁴ Tohda, T.⁵ Abe, A.⁶

26
- 0005354765
- (1978) J. Phys: D , vol.11 , pp. 643
- Agnihotri, O.P.¹ Sharma, A.K.² Gupta, B.K.³ Thangaraj, R.⁴

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