Crystallization and electrical property change on the annealing of amorphous indium-oxide and indium-tin-oxide thin films

Thin Solid Films

Volumn 359, Issue 1, 2000, Pages 61-67

  Morikawa, Hiroshi ^a   Fujita, Miya ^a  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AIR; AMORPHOUS FILMS; ANNEALING; CARRIER CONCENTRATION; CRYSTALLIZATION; ELECTRIC CONDUCTIVITY OF SOLIDS; SEMICONDUCTING INDIUM COMPOUNDS; SPUTTERING; THIN FILMS; VACUUM;

INDIUM OXIDE; INDIUM TIN OXIDE;

SEMICONDUCTING FILMS;

EID: 0033896873     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00749-X     Document Type: Article

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