Early stages of ITO deposition on glass or polymer substrates

Vacuum

Volumn 59, Issue 2-3, 2000, Pages 614-621

  Shigesato, Y ^a   Koshi ishi, R ^a   Kawashima, T ^b   Ohsako, J ^b  

^a AOYAMA GAKUIN UNIVERSITY   (Japan)

^b SONY CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001699163     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(00)00324-9     Document Type: Article

References (7)

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5. Song PK, Shigesato Y, Kamei M, Yasui I. Jpn J Appl Phys 1999;38:2921.
6. Volmer M, Weber A. Z Phys Chem 1925;119:277.
7. Sun XW, Huang HC, Kwok HS. Appl Phys Lett 1996;68:2663.