Polycrystalline growth and recrystallization processes in sputtered ITO thin films

Thin Solid Films

Volumn 510, Issue 1-2, 2006, Pages 260-264

  Guillen C ^a   Herrero, J ^a  

^a CIEMAT   (Spain)

Author keywords

Annealing; Indium tin oxide; Sputtering; Structural properties

Indexed keywords

CRYSTAL GROWTH; INDIUM COMPOUNDS; POLYCRYSTALLINE MATERIALS; SUBSTRATES; X RAY DIFFRACTION;

INDIUM TIN OXIDE; ITO THIN FILMS; POLYCRYSTALLINE GROWTH;

THIN FILMS;

EID: 33646412593     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.12.273     Document Type: Article

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