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Volumn 135, Issue 2, 2007, Pages 690-699

PZT thin films for low voltage actuation: Fabrication and characterization of the transverse piezoelectric coefficient

Author keywords

Microactuator; Piezoelectric coefficient; Piezoelectric thin films; PZT

Indexed keywords

ELECTRIC FIELD EFFECTS; ELECTRIC POTENTIAL; FINITE ELEMENT METHOD; MEMS; MICROACTUATORS; PIEZOELECTRICITY; SILICA;

EID: 34047152992     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.07.022     Document Type: Article
Times cited : (30)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.