Development of a light-driven thin-film piezoelectric microactuator

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn 7 MEMS, Issue , 2005, Pages 425-431

  Deshpande, Mandar ^a   Saggere, Laxman ^a  

^a University of Illinois   (United States)

Author keywords

Light driven; Microactuator; Piezoelectric; Solar cell; Thin film

Indexed keywords

MECHANICAL ACTUATION; PIEZOELECTRIC MICROACTUATOR; RETINAL PROSTHESIS;

PIEZOELECTRIC DEVICES; PROSTHETICS; SINGLE CRYSTALS; SOLAR CELLS; SOLID STATE DEVICES; THIN FILMS;

MICROACTUATORS;

EID: 33646007324     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2005-79819     Document Type: Conference Paper

References (14)

1. Guy, S., "Engineering prof designing micro-pump with goal of restoring sight," Chicago Sun-Times, June 15, 2005, p. 100. (Online at URL: http://www.suntimes.com/output/zinescene/cst-fin-ecol15.html).
2. Deshpande, M., and Saggere, L., "Modeling and Design of an Optically Powered Microactuator for a Microfluidic Dispenser," Journal of Mechanical Design, Vol. 127, July 2005, pp. 825-836.
3. Cochoy, O., "Design and assesment of a microfluidic dispenser for chronic chemical stimulation of retinal neurons," Master's Thesis, Mechanical and Industrial Engineering Department, University of Illinois at Chicago, Chicago, IL, 2003, (Advisor: Prof. Saggere).
4. Lee, J.B., et al, 1995, "Miniaturized high-voltage solar cell array as an electrostatic MEMS power supply," J. Microelectromech. Syst., 4(3), pp. 102-108.
5. Sakakibara, T., et al, 2002, "Multi-source power supply system using micro-photovoltaic devices combined with microwave antenna," Sens. Actuators A Phys., 95(2-3), pp. 208-211.
6. Hollar, S., et al, 2003, "Solar powered 10 mg silicon robot," The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, Jan 19-23 2003, Kyoto, Japan, pp. 706-711.
7. Bellew, C.L., Hollar, S. and Pister, K.S.J., 2003, "An SOI process for fabrication of solar cells, transistors and electrostatic actuators," Transducers'03, June 8-12, 2003, Boston, MA, 2, pp. 1075-1079.
8. Lasnier, F. and Gan Ang, T., 1990, Photovoltaic engineering handbook, A. Hilger, New York.
9. Polla, D.L. and Francis, L.F., 1998, "Processing and characterization of piezoelectric materials and integration into microelectromechanical systems," Annu Rev Mater Sci, 28(1), pp. 563-597.
10. Trolier-Mckinstry, S. and Murait, P., 2004, "Thin film piezoelectrics for MEMS," J Electroceram, 12(1-2), pp. 7-17.
11. Murait, P., 2000, "PZT thin films for microsensors and actuators: Where do we stand?" IEEE Trans Ultrason Ferroelectr Freq Control, 47(4), pp. 903-915.
12. Damjanovic, D., 1998, "Ferroelectric, dielectric and piezoelectric properties of ferroelectric thin films and ceramics," Reports Progress Physics, 61(9), pp. 1267-1324.
13. Wang, L.-., et al, 2001, "Wet-etch patterning of lead zirconate titanate (PZT) thick films for microelectromechanical systems (MEMS) applications," Material Science of Microelectromechanical Systems (MEMS) Devices III, Nov 27-28, 2000, Boston, MA, 657, pp. 5391-5396.
14. Glunz, S.W., et al, 2002, "High-efficiency silicon solar cells for low-illumination applications," 29th IEEE Photovoltaic Specialists Conference, May 19-24 2002, New Orleans, LA, United States, pp. 450-453.