Development of a light-driven thin-film piezoelectric microactuator

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn 7 MEMS, Issue , 2005, Pages 425-431

  Deshpande, Mandar ^a   Saggere, Laxman ^a  

^a University of Illinois at Chicago   (United States)

Author keywords

Light driven; Microactuator; Piezoelectric; Solar cell; Thin film

Indexed keywords

MECHANICAL ACTUATION; PIEZOELECTRIC MICROACTUATOR; RETINAL PROSTHESIS;

PIEZOELECTRIC DEVICES; PROSTHETICS; SINGLE CRYSTALS; SOLAR CELLS; SOLID STATE DEVICES; THIN FILMS;

MICROACTUATORS;

EID: 33646007324     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2005-79819     Document Type: Conference Paper

References (14)

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