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Volumn 7 MEMS, Issue , 2005, Pages 425-431

Development of a light-driven thin-film piezoelectric microactuator

Author keywords

Light driven; Microactuator; Piezoelectric; Solar cell; Thin film

Indexed keywords

MECHANICAL ACTUATION; PIEZOELECTRIC MICROACTUATOR; RETINAL PROSTHESIS;

EID: 33646007324     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2005-79819     Document Type: Conference Paper
Times cited : (2)

References (14)
  • 1
    • 33645974642 scopus 로고    scopus 로고
    • Engineering prof designing micro-pump with goal of restoring sight
    • June 15
    • Guy, S., "Engineering prof designing micro-pump with goal of restoring sight," Chicago Sun-Times, June 15, 2005, p. 100. (Online at URL: http://www.suntimes.com/output/zinescene/cst-fin-ecol15.html).
    • (2005) Chicago Sun-times , pp. 100
    • Guy, S.1
  • 2
    • 23044451405 scopus 로고    scopus 로고
    • Modeling and design of an optically powered microactuator for a microfluidic dispenser
    • July
    • Deshpande, M., and Saggere, L., "Modeling and Design of an Optically Powered Microactuator for a Microfluidic Dispenser," Journal of Mechanical Design, Vol. 127, July 2005, pp. 825-836.
    • (2005) Journal of Mechanical Design , vol.127 , pp. 825-836
    • Deshpande, M.1    Saggere, L.2
  • 3
    • 13944269783 scopus 로고    scopus 로고
    • Design and assesment of a microfluidic dispenser for chronic chemical stimulation of retinal neurons
    • Mechanical and Industrial Engineering Department, University of Illinois at Chicago, Chicago, IL, Advisor: Prof. Saggere
    • Cochoy, O., "Design and assesment of a microfluidic dispenser for chronic chemical stimulation of retinal neurons," Master's Thesis, Mechanical and Industrial Engineering Department, University of Illinois at Chicago, Chicago, IL, 2003, (Advisor: Prof. Saggere).
    • (2003) Master's Thesis
    • Cochoy, O.1
  • 4
    • 0029373769 scopus 로고
    • Miniaturized high-voltage solar cell array as an electrostatic MEMS power supply
    • Lee, J.B., et al, 1995, "Miniaturized high-voltage solar cell array as an electrostatic MEMS power supply," J. Microelectromech. Syst., 4(3), pp. 102-108.
    • (1995) J. Microelectromech. Syst. , vol.4 , Issue.3 , pp. 102-108
    • Lee, J.B.1
  • 5
    • 0036141559 scopus 로고    scopus 로고
    • Multi-source power supply system using micro-photovoltaic devices combined with microwave antenna
    • Sakakibara, T., et al, 2002, "Multi-source power supply system using micro-photovoltaic devices combined with microwave antenna," Sens. Actuators A Phys., 95(2-3), pp. 208-211.
    • (2002) Sens. Actuators A Phys. , vol.95 , Issue.2-3 , pp. 208-211
    • Sakakibara, T.1
  • 7
    • 84944715607 scopus 로고    scopus 로고
    • An SOI process for fabrication of solar cells, transistors and electrostatic actuators
    • June 8-12, 2003, Boston, MA
    • Bellew, C.L., Hollar, S. and Pister, K.S.J., 2003, "An SOI process for fabrication of solar cells, transistors and electrostatic actuators," Transducers'03, June 8-12, 2003, Boston, MA, 2, pp. 1075-1079.
    • (2003) Transducers'03 , vol.2 , pp. 1075-1079
    • Bellew, C.L.1    Hollar, S.2    Pister, K.S.J.3
  • 9
    • 0031623579 scopus 로고    scopus 로고
    • Processing and characterization of piezoelectric materials and integration into microelectromechanical systems
    • Polla, D.L. and Francis, L.F., 1998, "Processing and characterization of piezoelectric materials and integration into microelectromechanical systems," Annu Rev Mater Sci, 28(1), pp. 563-597.
    • (1998) Annu Rev Mater Sci , vol.28 , Issue.1 , pp. 563-597
    • Polla, D.L.1    Francis, L.F.2
  • 10
    • 3142722583 scopus 로고    scopus 로고
    • Thin film piezoelectrics for MEMS
    • Trolier-Mckinstry, S. and Murait, P., 2004, "Thin film piezoelectrics for MEMS," J Electroceram, 12(1-2), pp. 7-17.
    • (2004) J Electroceram , vol.12 , Issue.1-2 , pp. 7-17
    • Trolier-Mckinstry, S.1    Murait, P.2
  • 11
    • 0034228288 scopus 로고    scopus 로고
    • PZT thin films for microsensors and actuators: Where do we stand?
    • Murait, P., 2000, "PZT thin films for microsensors and actuators: Where do we stand?" IEEE Trans Ultrason Ferroelectr Freq Control, 47(4), pp. 903-915.
    • (2000) IEEE Trans Ultrason Ferroelectr Freq Control , vol.47 , Issue.4 , pp. 903-915
    • Murait, P.1
  • 12
    • 0000195589 scopus 로고    scopus 로고
    • Ferroelectric, dielectric and piezoelectric properties of ferroelectric thin films and ceramics
    • Damjanovic, D., 1998, "Ferroelectric, dielectric and piezoelectric properties of ferroelectric thin films and ceramics," Reports Progress Physics, 61(9), pp. 1267-1324.
    • (1998) Reports Progress Physics , vol.61 , Issue.9 , pp. 1267-1324
    • Damjanovic, D.1
  • 13
    • 0035556398 scopus 로고    scopus 로고
    • Wet-etch patterning of lead zirconate titanate (PZT) thick films for microelectromechanical systems (MEMS) applications
    • Nov 27-28, 2000, Boston, MA
    • Wang, L.-., et al, 2001, "Wet-etch patterning of lead zirconate titanate (PZT) thick films for microelectromechanical systems (MEMS) applications," Material Science of Microelectromechanical Systems (MEMS) Devices III, Nov 27-28, 2000, Boston, MA, 657, pp. 5391-5396.
    • (2001) Material Science of Microelectromechanical Systems (MEMS) Devices III , vol.657 , pp. 5391-5396
    • Wang, L.1
  • 14
    • 0036957783 scopus 로고    scopus 로고
    • High-efficiency silicon solar cells for low-illumination applications
    • New Orleans, LA, United States
    • Glunz, S.W., et al, 2002, "High-efficiency silicon solar cells for low-illumination applications," 29th IEEE Photovoltaic Specialists Conference, May 19-24 2002, New Orleans, LA, United States, pp. 450-453.
    • (2002) 29th IEEE Photovoltaic Specialists Conference, May 19-24 2002 , pp. 450-453
    • Glunz, S.W.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.