Micro-fabricated piezoelectric cantilever for atomic force microscopy

Review of Scientific Instruments

Volumn 67, Issue 11, 1996, Pages 3898-3903

  Watanabe, Shunji ^a   Fujii, Toru ^a,b  

^a NIKON CORPORATION   (Japan)

^b EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000368410     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1147290     Document Type: Article

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