Analog piezoelectric-driven tunable gratings with nanometer resolution

Journal of Microelectromechanical Systems

Volumn 13, Issue 6, 2004, Pages 998-1005

  Wong, Chee Wei ^a,b   Jeon, Yongbae ^a   Barbastathis, George ^a   Kim, Sang Gook ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b Och Spine at New York Presbyterian Hospitals   (United States)

Author keywords

Analog; Deformable membrane; Diffractive gratings; Nanometer resolution; Thin film piezoelectric; Tunable

Indexed keywords

DENSE WAVELENGTH DIVISION MULTIPLEXING; DIFFRACTION GRATINGS; ELECTROSTATIC ACTUATORS; MATHEMATICAL MODELS; OPTICAL COMMUNICATION; OPTICAL DESIGN; OPTICAL DEVICES; PERMITTIVITY; PIEZOELECTRIC MATERIALS; SEMICONDUCTOR DEVICE MANUFACTURE; THIN FILMS;

ANALOG TUNING; DEFORMABLE MEMBRANE; DIFFRACTIVE GRATINGS; NANOMETER RESOLUTION; THIN FILM PIEZOELECTRIC;

MICROELECTROMECHANICAL DEVICES;

EID: 10944223513     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.839592     Document Type: Article

References (21)

1. G. B. Hocker, D. Youngner, E. Deutsch, A. Volpicelli, S. Senturia, M. Butler, M. Sinclair, T. Plowman, and A. J. Ricco, "The Polychromator: a programmable MEMS diffraction grating for synthetic spectra," in Proc. Tech. Digest of Solid-State Sensors and Actuators Workshop, Transducers Research Foundation, Cleveland Heights, OH, 2000, pp. 89-92.
2. R. B. Apte, F. Sandejas, W. Banyai, and D. Bloom, "Grating light valves for high resolution displays," in Proc. Tech. Digest of Solid-State Sensors and Actuators Workshop, Transducers Research Foundation, Cleveland Heights, OH, 1994, pp. 1-6.
3. J. Castracane, M. A. Gutin, and O. N. Gutin, "Micro-mechanically controlled diffraction: a new tool for spectroscopy," in Proc. SPIE, Diffractive/Holographic Technologies and Spatial Light Modulators, , vol. 3951, 2000, pp. 36-45.
4. D. P. Resler, D. S. Hobbs, R. C. Sharp, L. J. Friedman, and T. A. Dorschner, "High-efficiency liquid-crystal optical phased-array beam steering," Opt. Lett., vol. 21, no. 9, pp. 689-691, 1996.
5. D. E. Sene, J. W. Grantham, V. M. Bright, and J. H. Comtois, "Development and characterization of micro-mechanical gratings for optical modulation," in Proc. IEEE Micro Electro Mechanical Systems Workshop, Piscataway, NJ, 1996, pp. 222-227.
6. X. M. Zhang and A. Q. Liu, "A MEMS pitch-tunable grating add/drop multiplexers," in Proc. IEEE Optical MEMS 2000 IEEE/LEOS International Conference, Piscataway, NJ, 2000, pp. 25-26.
7. B. E. A. Saleh and M. C. Teich, Fundamentals of Photonics, 1st ed. New York: Wiley-Interscience, 1991, pp. 799-831.
8. S. Jin, H. Mavoori, R. P. Espindola, L. E. Adams, and T. A. Strasser, "Magnetically tunable fiber Bragg gratings," in Proc. Tech. Digest of Optical Fiber Communication Conference, 1999, paper ThJ2-1.
9. T. Storgaard-Larsen, S. Bouwstra, and O. Leistiko, "Opto-mechanical accelerometer based on strain sensing by a Bragg grating in a planar waveguide," Sens. Actuators A, Phys., vol. 52, pp. 25-32, 1996.
10. D. M. Burns and V. M. Bright, "Micro-electro-mechanical variable blaze gratings," in Proc. IEEE MEMS Workshop, Piscataway, NJ, 1997, pp. 55-60.
11. C. W. Wong, W.-C. Shih, Y. B. Jeon, S. Desai, D. Freeman, S.-G. Kim, and G. Barbastathis, "Analog tunable gratings with nanometer resolution," in Proc. Tech. Digest of Solid-State Sensors, Actuators, and Microsystems Workshop, Transducers Research Foundation, Cleveland Heights, OH, 2002, pp. 342-345.
12. W.-C. Shih, C. W. Wong, Y. B. Jeon, S.-G. Kim, and G. Barbastathis, "Electrostatic and piezoelectric analog tunable diffractive gratings," in Proc. Conference on Lasers and Electro-Optics /Quantum Electronics and Lasers Science Conference, vol. 73, OSA Trends in Optics and Photonics, Washington, DC, 2002, paper CMP4.
13. M. S. Weinberg, "Working equations for piezoelectric actuators and sensors," J. Microelectromech. Syst., vol. 8, no. 4, pp. 529-533, 1999.
14. S. D. Senturia, Microsystem Design, 1st ed. Norwell, MA: Kluwer Academic, 2001, pp. 219-222.
15. S.-G. Kim and K.-H. Hwang, "Thin-film micromirror array (TMA) for large information display systems," J. Soc. Inform. Display, vol. 8, no. 2, pp. 177-181, 2000.
16. J. W. Goodman, Introduction to Fourier Optics, 2nd ed. New York: McGraw-Hill, 1996, pp. 73-83.
17. W. Liu, J. S. Ko, and W. Zhu, "Preparation and properties of multiplayer Pb(Zr,Ti)O3/PbTiO3 thin films for pyroelectric application," Thin Solid Films, vol. 371, no. 1-2, pp. 254-258, 2000.
18. C. W. Wong, "Strain-Tuning of Periodic Optical Devices: Tunable Gratings and Photonic Crystals," Sc.D. dissertation, Department of Mechanical Engineering, Massachusetts Institute of Technology, 2003.
19. D. A. Pommet, E. B. Grann, and M. G. Moharam, "Effects of process errors on the diffraction characteristics of binary dielectric gratings," Appl. Opt., vol. 34, no. 14, pp. 2430-2435, 1995.
20. D. M. Freeman, A. J. Aranyosi, M. J. Gordon, and S. S. Hong, "Multidimensional motion analysis of MEMS using computer microvision," in Proc. Tech. Digest of Solid-State Sensors and Actuators Workshop, Transducers Research Foundation, Cleveland Heights, OH, 1998, pp. 150-155.
21. D.-G. Kim and H.-G. Kim, "Piezoelectric properties of lead zirconate titanate thin films characterized by the pneumatic loading method," Integr. Ferroelect., vol. 24, pp. 107-119, 1999.