Micromachined ultrasonic transducers and acoustic sensors based on piezoelectric thin films

Journal of Electroceramics

Volumn 12, Issue 1-2, 2004, Pages 101-108

  Muralt, P ^a   Baborowski, J ^a  

^a EPFL   (Switzerland)

Author keywords

Acoustic sensors; Microsystems; Piezoelectric thin films

Indexed keywords

ACOUSTIC MICROSCOPES; CERAMIC MATERIALS; CMOS INTEGRATED CIRCUITS; ELECTRIC FIELDS; FABRICATION; MICROMACHINING; PIEZOELECTRIC DEVICES; SEALING (CLOSING); SENSORS; STIFFNESS; STRAIN; THIN FILMS;

ACOUSTIC SENSORS; ELECTROMECHANICAL COUPLINGS; MICROSYSTEMS; PIEZOELECTRIC THIN FILMS;

ULTRASONIC TRANSDUCERS;

EID: 3142766821     PISSN: 13853449     EISSN: None     Source Type: Journal    
DOI: 10.1023/B:JECR.0000034004.99355.8b     Document Type: Review

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