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Journal of Physics Condensed Matter

Volumn 15, Issue 30, 2003, Pages 5253-5259

Nanomechanical properties of lead zirconate titanate thin films by nanoindentation

(3) Fang, Te Hua a Jian, Sheng Rui b Chuu, Der San b

a SOUTHERN TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY (Taiwan)

b NATIONAL CHIAO TUNG UNIVERSITY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; HARDNESS; INDENTATION; MAGNETRON SPUTTERING; MORPHOLOGY; PEROVSKITE; SILICON; SURFACE ROUGHNESS; TEMPERATURE; X RAY DIFFRACTION ANALYSIS;

LEAD ZIRCONATE TITANATE; NANOINDENTATION; NANOMECHANICAL PROPERTIES; RADIO FREQUENCY MAGNETRON SPUTTERING;

FERROELECTRIC THIN FILMS;

EID: 0041562708 PISSN: 09538984 EISSN: None Source Type: Journal
DOI: 10.1088/0953-8984/15/30/307 Document Type: Article

Times cited : (45)

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