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Volumn 15, Issue 30, 2003, Pages 5253-5259
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Nanomechanical properties of lead zirconate titanate thin films by nanoindentation
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
ATOMIC FORCE MICROSCOPY;
ELASTIC MODULI;
HARDNESS;
INDENTATION;
MAGNETRON SPUTTERING;
MORPHOLOGY;
PEROVSKITE;
SILICON;
SURFACE ROUGHNESS;
TEMPERATURE;
X RAY DIFFRACTION ANALYSIS;
LEAD ZIRCONATE TITANATE;
NANOINDENTATION;
NANOMECHANICAL PROPERTIES;
RADIO FREQUENCY MAGNETRON SPUTTERING;
FERROELECTRIC THIN FILMS;
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EID: 0041562708
PISSN: 09538984
EISSN: None
Source Type: Journal
DOI: 10.1088/0953-8984/15/30/307 Document Type: Article |
Times cited : (45)
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References (14)
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