Water-immersible micromachined Pb(Zr, Ti)O3 thin film actuators

Journal of Electroceramics

Volumn 13, Issue 1-3, 2004, Pages 509-513

  Jeon, Yongbae ^a,b   Wong, Chee Wei ^a,b   Kim, Sang Gook ^a,b  

^a Micro and Nano Systems Laboratory   (United States)

^b Massachusetts Institute of Technology   (United States)

Author keywords

Actuator; MEMS; Piezoelectric; Thin film; Water immersible

Indexed keywords

LEAD COMPOUNDS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PASSIVATION; PIEZOELECTRIC MATERIALS; POLARIZATION; SOL-GELS; THIN FILMS;

METAL ELECTRODES; PIEZOELECTRIC LAYERS; SCANNING PROBE MICROSCOPE (SPM); WATER-IMMERSIBLE;

ACTUATORS;

EID: 17044373136     PISSN: 13853449     EISSN: 15738663     Source Type: Journal    
DOI: 10.1007/s10832-004-5149-0     Document Type: Conference Paper

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