Measurement of piezoelectric coefficients of lead zirconate titanate thin films by strain-monitoring pneumatic loading method

Applied Physics Letters

Volumn 80, Issue 24, 2002, Pages 4606-4608

  Park, Gun Tae ^a   Choi, Jong Jin ^a   Ryu, Jungho ^a   Fan, Huiqing ^a   Kim, Hyoun Ee ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BULK PIEZOELECTRIC MATERIAL; COATING METHODS; LEAD ZIRCONATE TITANATE THIN FILMS; PIEZOELECTRIC COEFFICIENT; PNEUMATIC LOADING; PRESSURIZED GAS; PZT THIN FILM; RADIAL STRAINS; RESONANCE METHODS; SILICON SUBSTRATES;

PNEUMATICS; SEMICONDUCTING LEAD COMPOUNDS; THIN FILMS;

PIEZOELECTRICITY;

EID: 79956019250     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1487901     Document Type: Article

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