PZT polarization voltage effects on off-centered PZT patch actuating silicon membrane

Sensors and Actuators, A: Physical

Volumn 110, Issue 1-3, 2004, Pages 385-389

  Guirardel, Matthieu ^a   Bergaud, Christian ^a   Cattan, Eric ^b   Remiens, Denis ^b   Belier, Benoit ^c   Petitgrand, Sylvain ^c   Bosseboeuf, Alain ^c  

^a LAAS CNRS   (France)

^b UNIVERSITÉ DE VALENCIENNES   (France)

^c UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

Piezoelectric thin films; Silicon membrane; Static and dynamic characterizations

Indexed keywords

ANNEALING; CRYSTALLIZATION; DEFORMATION; ELECTRIC POTENTIAL; INTERFEROMETERS; MEMBRANES; PIEZOELECTRIC MATERIALS; SILICON;

PIEZOELECTRIC THIN FILMS; SILICON MEMBRANE; STATIC AND DYNAMIC CHARACTERIZATIONS; VOLTAGE EFFECTS;

THIN FILMS;

EID: 1642566516     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.08.016     Document Type: Conference Paper

References (8)

1. Muralt P. Ferroelectric thin films for micro-sensors and actuators: a review. J. Micromech. Microeng. 10:2000;146.
2. Muralt P., Kholkin A., Kohli M., Maeder T. Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions. Sens. Actuators A. 53:1996;398.
3. Jaber B., Remiens D., Cattan F., Tronc P., Thierry B. Characterization of ferroelectric and piezoelectric properties of lead titanate thin films deposited on Si by sputtering. Sens. Actuators A. 63:1997;91.
4. Petitgrand S., Yahiaoui R., Danaie K., Bosseboeuf A., Gilles J.P. 3D measurement of micromechanical device vibration mode shapes with a stroboscopic interferometric microscope. Opt. Lasers Eng. 36:2001;77.
5. Steel M.R., Harrison F., Harper P.G. The piezoelectric bimorph: an experimental and theoretical study of its quasistatic response. J. Phys. D: Appl. Phys. 11:1978;979.
6. Roytburd A.L., Alpay S.P., Nagarajan V., Ganoule C.S., Aggarwal S. Measurement of internal stresses via the polarization in epitaxial ferroelectric films. Phys. Rev. Lett. 85(1):2000;190.
7. Kholkin A.L., Akdogan E.K., Safari A., Chauvy P.F., Setter N. Characterization of the effective electrostriction coefficients in ferroelectric thin films. J. Appl. Phys. 89:2001;8066.
8. 3 ferroelectric thin film capacitors. J. Appl. Phys. 86:1999;607.