Dependences of Young's modulus of porous silica low dielectric constant films on skeletal structure and porosity

Journal of Applied Physics

Volumn 100, Issue 12, 2006, Pages

  Takada, Syozo ^a   Hata, Nobuhiro ^a   Seino, Yutaka ^a   Fujii, Nobutoshi ^b   Kikkawa, Takamaro ^c  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b ASSOCIATION OF SUPER ADVANCED ELECTRONICS TECHNOLOGIES ASET   (Japan)

^c HIROSHIMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHEMICAL BONDS; ELASTIC MODULI; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PERMITTIVITY; POROSITY; POROUS SILICON; SPIN COATING; SURFACE ACTIVE AGENTS;

ACIDIC SILICA SOL; POROUS SILICA FILMS; SKELETAL STRUCTURE; TEMPLATE CONCENTRATION;

THIN FILMS;

EID: 33846051839     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2401660     Document Type: Article

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