Mechanical property and network structure of porous silica films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 5 A, 2004, Pages 2453-2456

  Takada, Syozo ^a   Hata, Nobuhiro ^a   Seino, Yutaka ^a   Yamada, Kazuhiro ^b   Oku, Yoshiaki ^b   Kikkawa, Takamaro ^a,c  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b ASSOCIATION OF SUPER ADVANCED ELECTRONICS TECHNOLOGIES ASET   (Japan)

^c HIROSHIMA UNIVERSITY   (Japan)

Author keywords

Elastic modulus; FTIR; Low k; Nanoindentation; Porous structure

Indexed keywords

ELASTIC MODULI; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GLASS; INDENTATION; REFLECTION; SILICA; SOL-GELS; X RAY SCATTERING;

GLASSY MATERIALS; NANOINDENTATION; POROUS STRUCTURES; SILICA FILMS;

POROUS MATERIALS;

EID: 3142693450     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.2453     Document Type: Article

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