Asymmetric peak line shape of infrared dielectric function spectra for thermally grown silicon dioxide films

Journal of Applied Physics

Volumn 88, Issue 12, 2000, Pages 7150-7156

  Ishikawa, Kenji ^a   Suzuki, Kunihiro ^a   Okamura, Shigeru ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0011082423     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1325377     Document Type: Article

References (26)

1. C. T. Kirk, Phys. Rev. B 38, 1255 (1988).
2. 2 Interface, edited by C. R. Helms and B. E. Deal (Plenum, New York, 1988), p. 139.
3. N. Yasuda, S. Takagi, and A. Toriumi, Appl. Surf. Sci. 117/118, 216 (1997).
4. K. Ishikawa, H. Ogawa, and S. Fujimura, J. Appl. Phys. 85, 4076 (1999).
5. B. Harbecke, Appl. Phys. A: Solids Surf. 40, 151 (1986).
6. V. Hopfe, P. Bussemer, E. Richter, and P. Klobes, J. Phys. D 25, 288 (1992).
7. A. M. Efimov, J. Non-Cryst. Solids 203, 1 (1996).
8. P. Grosse, B. Harbecke, B. Heinz, R. Meyer, and M. Offenberg, Appl. Phys. A: Solids Surf. 39, 257 (1986).
9. R. Brendel and D. Bormann, J. Appl. Phys. 71, 1 (1992).
10. P. N. Sen and M. F. Thorpe, Phys. Rev. B 15, 4030 (1977).
11. F. L. Galeener, Phys. Rev. B 19, 4292 (1979).
12. M. L. Naiman, C. T. Kirk, R. J. Aucoin, F. L. Terry, P. W. Wyatt, and S. D. Senturia, J. Electrochem. Soc. 131, 637 (1984).
13. I. P. Lisovskii, V. G. Litovchenko, V. B. Lozinskii, S. I. Frolov, H. Flietner, W. Fussel, and E. G. Schmidt, J. Non-Cryst. Solids 187, 91 (1995).
14. P. H. Gaskell and D. W. Johnson, J. Non-Cryst. Solids 20, 171 (1976).
15. I. W. Boyd and J. I. B. Wilson, J. Appl. Phys. 62, 3195 (1987).
16. E. A. Irene, E. Tierney, and J. Angilello, J. Electrochem. Soc. 129, 2594 (1982).
17. 2 Interface 2, edited by C. R. Helms and B. E. Deal (Plenum, New York, 1993), p. 99.
18. H. Hobert and H. H. Dunken, J. Non-Cryst. Solids 195, 64 (1996).
19. G. E. Walrafen, Y. C. Chu, and M. S. Hokmabadi, J. Chem. Phys. 92, 6987 (1990).
20. R. A. B. Devine, J. Vac. Sci. Technol. A 6, 3154 (1988).
21. A. Lehmann, L. Schumann, and K. Hübner, Phys. Status Solidi B 117, 689 (1983).
22. R. Hussin, R. Dupree, and D. Holland, J. Non-Cryst. Solids 246, 159 (1999).
23. R. F. Pettifer, R. Dupree, I. Farnan, and U. Sternberg, J. Non-Cryst. Solids 106, 408 (1988).
24. P. Vashishta, R. K. Kalia, J. P. Rino, and I. Ebbsjö, Phys. Rev. B 41, 12197 (1990).
25. W. H. Press, S. A. Teukolsky, W. T. Vetterling, and B. P. Flannery, Numerical Recipes in C, 2nd ed. (Cambridge University Press, Cambridge, 1988), Chap. 12.
26. D. Edwards, in Handbook of Optical Constants of Solids, edited by E. D. Palik (Academic, San Diego, 1985), p. 547.