Infrared ellipsometry study of evaporated SiO2 films: Matrix densification, porosity, water sorption

Journal of Applied Physics

Volumn 82, Issue 3, 1997, Pages 1330-1335

  Brunet Bruneau, A ^a   Rivory, J ^a   Rafin, B ^b   Robic, J Y ^b   Chaton, P ^b  

^a CNRS   (France)

^b CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000090453     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365906     Document Type: Article

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