Local atomic bonding in fluorinated silicon oxides: Bond-ionicity-controlled contributions of infrared-active vibrations to the static dielectric constant

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 3 SUPPL. B, 1997, Pages 1368-1373

  Locuvsky, Gerald ^a   Yang, Hong ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

Chemical stability; Infrared active vibrations; Infrared effective charges; Low dielectric constant materials; Si F bond stretching vibrations; Si O bond stretching vibrations; Si O F alloys

Indexed keywords

EID: 0005012715     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.1368     Document Type: Article

References (12)

1. S. W. Lim, Y. Shimogaki, Y, Nakano, K. Tada and H. Komiyama: Ext. Abstr. 1995 Int. Conf. Solid State Device and Materials (Business Center for Academic Societies Japan, Tokyo, 1995) p. 163.
2. S. W. Lim, Y. Shimogaki, Y, Nakano, K. Tada and H. Komiyama: Jpn. J. Appl. Phys. 35 (1996) 1468.
3. Abstr. 1996 Electrochemical Society Meet. Los Angeles, CA., May 1996.
4. N. Hayasaka, H. Miyajima, Y. Nakasaki and R. Katsumaa: Ext. Abstr. 1995 Int. Conf. Solid State Device and Materials (Business Center for Academic Societies Japan, Tokyo, 1995) p. 157.
5. G. Lucovsky: Fudamentals Physics of Amorphous Semicondudctors, ed. F. Yonezawa (Springer-Verlag, Berlin, 1980) p. 87.
6. J. A. Theil, D. V. Tsu, S. S. Kim and G. Lucovsky: J. Vac. Sci. Technol. A 8 (1990) 1374.
7. A. G. Revesz and G. V. Gibbs: The Physics of MOS Insulators, eds. G. Lucovsky, S. T. Pantelides and F. L. Galeener (Pergamon Press, New York, 1980) p. 92.
8. H. Yang, G. Lucovsky and J. L. Whitten: unpublished.
9. J. T. Fitch, C. H. Bjorkman, G. Lucovsky, F. H. Pollak and X. Yin: J. Vac. Sci. Technol. B 7 (1989) 775.
10. G. Burns: Solid State Physics (Academic Press, New York, 1985).
11. R. T. Sanderson: Chemical Bonds and Bond Energy (Academic Press, New York, 1971).
12. J. E. Huheey: Inorganic Chemistry (Harper and Row, New York, 1978) Chap. 4.