Micromachining by laser ablation of liquid: Superheated liquid and phase explosion

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3933, Issue , 2000, Pages 347-354

  Wang, J ^a   Niino, H ^a   Yabe, A ^a  

^a NATL INST OF MAT AND CHEM RES   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; ASPECT RATIO; BOILING LIQUIDS; CALCIUM COMPOUNDS; ETCHING; FUSED SILICA; HIGH PRESSURE EFFECTS; HIGH TEMPERATURE EFFECTS; LASER ABLATION; QUARTZ; THERMODYNAMIC PROPERTIES;

CALCIUM FLUORIDE; EXPLOSIVE BOILING; PHASE EXPLOSION; PYRENE;

MICROMACHINING;

EID: 0033703625     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)