-
1
-
-
0035456618
-
"A reliable course of scanning capacitance microscopy analysis applied for 2D-Dopant profilings of power MOSFET devices"
-
Sep./Oct
-
M. Leicht, G. Fritzer, B. Basnar, S. Golka, and J. Smoliner, "A reliable course of scanning capacitance microscopy analysis applied for 2D-Dopant profilings of power MOSFET devices," Microelectron. Reliab., vol. 41, no. 9/10, pp. 1535-1537, Sep./Oct. 2001.
-
(2001)
Microelectron. Reliab.
, vol.41
, Issue.9-10
, pp. 1535-1537
-
-
Leicht, M.1
Fritzer, G.2
Basnar, B.3
Golka, S.4
Smoliner, J.5
-
2
-
-
8444241249
-
"Quantification of scanning capacitance microscopy measurements for 2D dopant profiling"
-
Aug.-Oct
-
P. Malberti, L. Ciampolini, M. Ciappa, and W. Fichtner, "Quantification of scanning capacitance microscopy measurements for 2D dopant profiling," Microelectron. Reliab., vol. 40, no. 8-10, pp. 1395-1399, Aug.-Oct. 2000.
-
(2000)
Microelectron. Reliab.
, vol.40
, Issue.8-10
, pp. 1395-1399
-
-
Malberti, P.1
Ciampolini, L.2
Ciappa, M.3
Fichtner, W.4
-
3
-
-
0042467530
-
"Simulation and experimental validation of scanning capacitance microscopy measurements across low-doped epitaxial PN-Junction"
-
Sep.-Nov
-
M. Stangoni, M. Ciappa, M. Buzzo, M. Leicht, and W. Fichtner, "Simulation and experimental validation of scanning capacitance microscopy measurements across low-doped epitaxial PN-Junction," Microelectron. Reliab., vol. 42, no. 9-11, pp. 1701-1706, Sep.-Nov. 2002.
-
(2002)
Microelectron. Reliab.
, vol.42
, Issue.9-11
, pp. 1701-1706
-
-
Stangoni, M.1
Ciappa, M.2
Buzzo, M.3
Leicht, M.4
Fichtner, W.5
-
4
-
-
0035247655
-
+-p samples"
-
Feb
-
+-p samples," Mater. Sci. Semicond. Process., vol. 4, no. 1-3, pp. 85-88, Feb. 2001.
-
(2001)
Mater. Sci. Semicond. Process.
, vol.4
, Issue.1-3
, pp. 85-88
-
-
Ciampolini, L.1
Giannazzo, F.2
Ciappa, M.3
Fichtner, W.4
Raineri, V.5
-
5
-
-
0035247427
-
"Carrier concentration profiles in 6H-SiC by scanning capacitance microscopy"
-
Feb
-
F. Giannazzo, P. Musumeci, L. Calcagno, A. Makhtari, and V. Raineri, "Carrier concentration profiles in 6H-SiC by scanning capacitance microscopy," Mater. Sci. Semicond. Process., vol. 4, no. 1-3, pp. 195-199, Feb. 2001.
-
(2001)
Mater. Sci. Semicond. Process.
, vol.4
, Issue.1-3
, pp. 195-199
-
-
Giannazzo, F.1
Musumeci, P.2
Calcagno, L.3
Makhtari, A.4
Raineri, V.5
-
6
-
-
0035246821
-
"Scanning capacitance microscopy investigations of SiC structures"
-
Feb
-
O. Bowallius, S. Anand, N. Nordell, G. Landgren, and S. Karlsson, "Scanning capacitance microscopy investigations of SiC structures," Mater. Sci. Semicond. Process., vol. 4, no. 1-3, pp. 209-211, Feb. 2001.
-
(2001)
Mater. Sci. Semicond. Process.
, vol.4
, Issue.1-3
, pp. 209-211
-
-
Bowallius, O.1
Anand, S.2
Nordell, N.3
Landgren, G.4
Karlsson, S.5
-
7
-
-
0036472351
-
"Use of scanning capacitance microscopy for controlling wafer processing"
-
Feb
-
O. Jeandupeux, V. Marsico, A. Acovic, P. Fazan, H. Brune, and K. Kern, "Use of scanning capacitance microscopy for controlling wafer processing," Microelectron. Reliab., vol. 42, no. 2, pp. 225-231, Feb. 2002.
-
(2002)
Microelectron. Reliab.
, vol.42
, Issue.2
, pp. 225-231
-
-
Jeandupeux, O.1
Marsico, V.2
Acovic, A.3
Fazan, P.4
Brune, H.5
Kern, K.6
-
8
-
-
0035246929
-
"Evaluation of different oxidation methods for silicon for scanning capacitance microscopy"
-
Feb
-
O. Bowallius and S. Anand, "Evaluation of different oxidation methods for silicon for scanning capacitance microscopy," Mater. Sci. Semicond. Process., vol. 4, no. 1-3, pp. 81-84, Feb. 2001.
-
(2001)
Mater. Sci. Semicond. Process.
, vol.4
, Issue.1-3
, pp. 81-84
-
-
Bowallius, O.1
Anand, S.2
-
9
-
-
0035049132
-
"Two-dimensional, electrostatic finite element study of tip-substrate interactions in electric force microscopy of high density interconnect structures"
-
Apr
-
T. S. Gross, C. M. Prindle, K. Chamberlin, N. B. Kamsah, and Y. Wu, "Two-dimensional, electrostatic finite element study of tip-substrate interactions in electric force microscopy of high density interconnect structures," Ultramicroscopy, vol. 87, no. 3, pp. 147-154, Apr. 2001.
-
(2001)
Ultramicroscopy
, vol.87
, Issue.3
, pp. 147-154
-
-
Gross, T.S.1
Prindle, C.M.2
Chamberlin, K.3
Kamsah, N.B.4
Wu, Y.5
-
10
-
-
0033896451
-
"Electronic properties of single semiconductor nanocrystals: Optical and electrostatic force microscopy measurements"
-
Jan
-
T. D. Krauss and L. E. Brus, "Electronic properties of single semiconductor nanocrystals: Optical and electrostatic force microscopy measurements," Mater. Sci. Eng., B, vol. 69-70, no. 1, pp. 289-294, Jan. 2000.
-
(2000)
Mater. Sci. Eng., B
, vol.69-70
, Issue.1
, pp. 289-294
-
-
Krauss, T.D.1
Brus, L.E.2
-
11
-
-
0033723409
-
"Electric force microscopy study of the surface electrostatic property of rubbed polyimide alignment layers"
-
Jul
-
X. Liang, J. Liu, L. Han, H. Tang, and S.-Y. Xu, "Electric force microscopy study of the surface electrostatic property of rubbed polyimide alignment layers," Thin Solid Films, vol. 370, no. 1, pp. 238-242, Jul. 2000.
-
(2000)
Thin Solid Films
, vol.370
, Issue.1
, pp. 238-242
-
-
Liang, X.1
Liu, J.2
Han, L.3
Tang, H.4
Xu, S.-Y.5
-
12
-
-
0035390327
-
"Epitaxial layer sheet resistance outside and under ohmic contacts measurements using electrostatic force microscopy"
-
Jul
-
J. F. Bresse and S. Blayac, "Epitaxial layer sheet resistance outside and under ohmic contacts measurements using electrostatic force microscopy," Solid State Electron., vol. 45, no. 7, pp. 1071-1076, Jul. 2001.
-
(2001)
Solid State Electron.
, vol.45
, Issue.7
, pp. 1071-1076
-
-
Bresse, J.F.1
Blayac, S.2
-
13
-
-
33645372218
-
"Theoretical study on tunneling acoustic microscopy"
-
Nanjing, China
-
S. Du, D. Gao, J. Zhang, and S. Zhang, "Theoretical study on tunneling acoustic microscopy," in Proc. 9th Int. Conf. Photoacoustic and Photothermal Phenomena, Nanjing, China, 1996, pp. 542-543.
-
(1996)
Proc. 9th Int. Conf. Photoacoustic and Photothermal Phenomena
, pp. 542-543
-
-
Du, S.1
Gao, D.2
Zhang, J.3
Zhang, S.4
-
14
-
-
0032267954
-
"Tunneling acoustic microscopy: Modes and mechanism"
-
B. Shen, S. Du, D. Gao, and S. Zhang, "Tunneling acoustic microscopy: Modes and mechanism," Acta Acustica, vol. 23, no. 4, pp. 289-296, 1998.
-
(1998)
Acta Acustica
, vol.23
, Issue.4
, pp. 289-296
-
-
Shen, B.1
Du, S.2
Gao, D.3
Zhang, S.4
-
15
-
-
0029632711
-
"A general protocol for the reconstruction of 3D atom probe data"
-
Mar
-
P. Bas, A. Bostel, B. Deconihout, and D. Blavette, "A general protocol for the reconstruction of 3D atom probe data," Appl. Surf. Sci., vol. 87-88, no. 1-4, pp. 298-304, Mar. 1995.
-
(1995)
Appl. Surf. Sci.
, vol.87-88
, Issue.1-4
, pp. 298-304
-
-
Bas, P.1
Bostel, A.2
Deconihout, B.3
Blavette, D.4
-
16
-
-
0032171147
-
"Overabundant single-particle electron microscope views induce a three-dimensional reconstruction artifact"
-
Sep
-
N. Boisset, P. A. Penczek, J.-C. Taveau, V. You, F. de Haas, and J. Lamy, "Overabundant single-particle electron microscope views induce a three-dimensional reconstruction artifact," Ultramicroscopy, vol. 74, no. 4, pp. 201-207, Sep. 1998.
-
(1998)
Ultramicroscopy
, vol.74
, Issue.4
, pp. 201-207
-
-
Boisset, N.1
Penczek, P.A.2
Taveau, J.-C.3
You, V.4
de Haas, F.5
Lamy, J.6
-
17
-
-
0033788351
-
"Recent developments in cryo-electron microscopy reconstruction of single particles"
-
Oct
-
Y. Tao and W. Zhang, "Recent developments in cryo-electron microscopy reconstruction of single particles," Curr. Opin. Struct. Biol., vol. 10, no. 5, pp. 616-622, Oct. 2000.
-
(2000)
Curr. Opin. Struct. Biol.
, vol.10
, Issue.5
, pp. 616-622
-
-
Tao, Y.1
Zhang, W.2
-
18
-
-
0032473783
-
"Investigation of polystyrene nanoparticles and DNA-protein complexes by AFM with image reconstruction"
-
Apr
-
I. Lee, X. Wang, C. F. Zhu, C. Wang, and C. Bai, "Investigation of polystyrene nanoparticles and DNA-protein complexes by AFM with image reconstruction," Appl. Surf. Sci., vol. 126, no. 3, pp. 281-286, Apr. 1998.
-
(1998)
Appl. Surf. Sci.
, vol.126
, Issue.3
, pp. 281-286
-
-
Lee, I.1
Wang, X.2
Zhu, C.F.3
Wang, C.4
Bai, C.5
-
19
-
-
0034333406
-
"Experimental test of blind tip reconstruction for scanning probe microscopy"
-
Nov
-
L. S. Dongmo, J. S. Villarrubia, S. N. Jones, T. B. Renegar, M. T. Postek, and J. F. Song, "Experimental test of blind tip reconstruction for scanning probe microscopy," Ultramicroscopy, vol. 85, no. 3, pp. 141-153, Nov. 2000.
-
(2000)
Ultramicroscopy
, vol.85
, Issue.3
, pp. 141-153
-
-
Dongmo, L.S.1
Villarrubia, J.S.2
Jones, S.N.3
Renegar, T.B.4
Postek, M.T.5
Song, J.F.6
-
20
-
-
8744234038
-
"Algorithms for scanned probe microscope image simulation, surface reconstruction, and tip estimation"
-
J. S. Villarrubia, "Algorithms for scanned probe microscope image simulation, surface reconstruction, and tip estimation," J. Res. Natl. Inst. Stand. Technol., vol. 102, no. 4, pp. 425-454, 1997.
-
(1997)
J. Res. Natl. Inst. Stand. Technol.
, vol.102
, Issue.4
, pp. 425-454
-
-
Villarrubia, J.S.1
-
21
-
-
0037012493
-
"Porous thin films for the characterization of atomic force microscope tip morphology"
-
Apr
-
D. Vick, M. J. Brett, and K. Westra, "Porous thin films for the characterization of atomic force microscope tip morphology," Thin Solid Films, vol. 408, no. 1-2, pp. 79-86, Apr. 2002.
-
(2002)
Thin Solid Films
, vol.408
, Issue.1-2
, pp. 79-86
-
-
Vick, D.1
Brett, M.J.2
Westra, K.3
-
22
-
-
0035501372
-
"A method to improve the quantitative analysis of SFM images at the nanoscale"
-
Oct
-
B. A. Todd and S. J. Eppell, "A method to improve the quantitative analysis of SFM images at the nanoscale," Surf. Sci., vol. 491, no. 3, pp. 473-483, Oct. 2001.
-
(2001)
Surf. Sci.
, vol.491
, Issue.3
, pp. 473-483
-
-
Todd, B.A.1
Eppell, S.J.2
-
24
-
-
0002199949
-
"Creep, hysteresis, and vibration compensation for piezoactuators: Atomic force microscopy application"
-
Mar
-
D. Croft, G. Shed, and S. Devasia, "Creep, hysteresis, and vibration compensation for piezoactuators: Atomic force microscopy application," J. Dyn. Syst. Meas. Control, vol. 123, no. 1, pp. 35-43, Mar. 2001.
-
(2001)
J. Dyn. Syst. Meas. Control
, vol.123
, Issue.1
, pp. 35-43
-
-
Croft, D.1
Shed, G.2
Devasia, S.3
-
25
-
-
5244377908
-
"Study of large travel tube scanner for photon scanning tunneling microscopy and its investigation for soft materials"
-
Apr
-
S. Du, D. Gao, B. Zhang, T. Han, Y. Wu, and S. Zhang, "Study of large travel tube scanner for photon scanning tunneling microscopy and its investigation for soft materials," Rev. Sci. Instrum., vol. 68, no. 4, pp. 1764-1768, Apr. 1997.
-
(1997)
Rev. Sci. Instrum.
, vol.68
, Issue.4
, pp. 1764-1768
-
-
Du, S.1
Gao, D.2
Zhang, B.3
Han, T.4
Wu, Y.5
Zhang, S.6
-
26
-
-
0035506886
-
"In-situ observation of deposition process of Pd on clean Si surfaces by ultrahigh vacuum-transmission electron microscopy/scanning tunneling microscopy"
-
Nov
-
M. Tanaka, M. Takeguchi, H. Yasuda, and K. Furuya, "In-situ observation of deposition process of Pd on clean Si surfaces by ultrahigh vacuum-transmission electron microscopy/scanning tunneling microscopy," Thin Solid Films, vol. 398-399, pp. 374-378, Nov. 2001.
-
(2001)
Thin Solid Films
, vol.398-399
, pp. 374-378
-
-
Tanaka, M.1
Takeguchi, M.2
Yasuda, H.3
Furuya, K.4
-
28
-
-
0033908531
-
2 (0001) "
-
2 (0001)," Surf. Sci., vol. 445, no. 23, pp. 407-419, 2000.
-
(2000)
Surf. Sci.
, vol.445
, Issue.23
, pp. 407-419
-
-
Perrot, E.1
Humbert, A.2
Piednoir, A.3
Chapon, C.4
Henry, C.R.5
-
29
-
-
0029354416
-
"Probing of oscillating surfaces by a scanning acoustic tunneling microscope"
-
Aug
-
T. Hesjedal, E. Chilla, and H. J. Fröhlich, "Probing of oscillating surfaces by a scanning acoustic tunneling microscope," Thin Solid Films, vol. 264, no. 2, pp. 226-229, Aug. 1995.
-
(1995)
Thin Solid Films
, vol.264
, Issue.2
, pp. 226-229
-
-
Hesjedal, T.1
Chilla, E.2
Fröhlich, H.J.3
-
30
-
-
0030124258
-
"Effect of surface acoustic waves on single electron tunneling in scanning tunneling microscopes"
-
Feb
-
N. Hatakenaka and S. Kurihara, "Effect of surface acoustic waves on single electron tunneling in scanning tunneling microscopes," Physica B, vol. 219-220, no. 1-4, pp. 723-726, Feb. 1996.
-
(1996)
Physica B
, vol.219-220
, Issue.1-4
, pp. 723-726
-
-
Hatakenaka, N.1
Kurihara, S.2
|