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Volumn 40, Issue 8-10, 2000, Pages 1395-1399

Quantification of scanning capacitance microscopy measurements for 2D dopant profiling

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Indexed keywords


EID: 8444241249     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(00)00163-3     Document Type: Article
Times cited : (11)

References (6)
  • 5
    • 0033712826 scopus 로고    scopus 로고
    • Effective channel length and base width measurements by
    • V Raineri, S Lombardo Effective channel length and base width measurements by SCM J Vac Sci Techn B18(2000)545-548
    • (2000) SCM J Vac Sci Techn B , vol.18 , pp. 545-548
    • Raineri, V.1    Lombardo, S.2
  • 6
    • 0033697212 scopus 로고    scopus 로고
    • Carrier concentration dependence of SCM signal in the vicinity of p-n junctions
    • J. Kopanski, J. Marchiando, J. Albers, B. Rennex Carrier concentration dependence of SCM signal in the vicinity of p-n junctions J Vac Sci Techn B18(2000)409-413
    • (2000) J Vac Sci Techn B , vol.18 , pp. 409-413
    • Kopanski, J.1    Marchiando, J.2    Albers, J.3    Rennex, B.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.