In-situ observation of Pd2Si islands on Si by UHV-TEM/STM

Journal of Crystal Growth

Volumn 237-239, Issue 1-4 I, 2002, Pages 254-258

  Tanaka, Miyoko ^a   Takeguchi, Masaki ^a   Furuya, Kazuo ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

A1. Scanning tunneling microscopy; A1. Transmission electron microscopy; A2. Island growth; B1. Silicide

Indexed keywords

ANNEALING; COMPUTER SIMULATION; DEPOSITION; PALLADIUM COMPOUNDS; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTING SILICON; SURFACE TOPOGRAPHY; TRANSMISSION ELECTRON MICROSCOPY;

SURFACE RECONSTRUCTION;

CRYSTAL GROWTH;

EID: 17344375767     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(01)01878-4     Document Type: Conference Paper

References (15)