SCOPUS 정보 검색 플랫폼

Ultramicroscopy

Volumn 85, Issue 3, 2000, Pages 141-153

Experimental test of blind tip reconstruction for scanning probe microscopy

(6) Dongmo, L S a Villarrubia, J S a Jones, S N a Renegar, T B a Postek, M T a Song, J F a

a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (United States)

Author keywords

Blind reconstruction; Dimensional metrology; SPM; Tip characterization

Indexed keywords

CRYSTAL SYMMETRY; IMAGE RECONSTRUCTION; METEOROLOGY; MICROMETERS; SILICON NITRIDE; SURFACE MEASUREMENT;

SCANNING PROBE MICROSCOPE; STYLUS PROFILING INSTRUMENT;

SCANNING ELECTRON MICROSCOPY;

DIAMOND;

ACCURACY; EXPERIMENT; GEOMETRY; IMAGE PROCESSING; MEASUREMENT; REVIEW; SCANNING ELECTRON MICROSCOPY; SCANNING PROBE MICROSCOPY; SIMULATION; TECHNIQUE;

EID: 0034333406 PISSN: 03043991 EISSN: None Source Type: Journal
DOI: 10.1016/S0304-3991(00)00051-6 Document Type: Article

Times cited : (124)

References (30)

1
- 0028493778
- (1994) Rev. Sci. Instr. , vol.65 , Issue.8 , pp. 2538
- Marchman, H.M.¹ Griffith, J.E.² Filas, R.W.³

2
- 0029205918
- (1995) Appl. Opt. , vol.34 , pp. 213
- Bennet, J.M.¹ Jahanmir, J.² Podlesny, J.C.³ Balter, T.L.⁴ Hobbs, T.D.⁵

3
- 0007736970
- J. Schneir, M.C. Sweenew, T. H. McWaid, Fourth Workshop on Industrial Applications of Scanning Probe Microscopy, NIST Gaithersburg, MD, USA, 1997, pp. 30-31.

4
- 0007785071
- W. Morris, Technical Program, Fourth Workshop on Industrial Applications of Scanning Probe Microscopy, NIST Gaithersburg, MD, USA, 1997, pp. 18-19.

5
- 0007831514
- Semiconductor Industry Association, National Technology Roadmap for Semiconductors, 1997.

6
- 36549093034
- (1990) J. Appl. Phys. , vol.67 , Issue.3 , pp. 1156
- Reiss, G.¹ Vancea, J.² Wittmann, H.³ Zweck, J.⁴ Hoffmann, H.⁵

7
- 0000478707
- (1990) Appl. Phys. Lett. , vol.57 , pp. 867
- Reiss, G.¹ Schneider, F.² Vancea, J.³ Hoffmann, H.⁴

8
- 0026206391
- (1991) Surf. Sci. , vol.253 , pp. 353
- Keller, D.J.¹

9
- 0347417452
- (1994) J. Vac. Sci. Technol. B , vol.13 , Issue.2 , pp. 344
- Westra, K.L.¹ Thomson, D.J.²

10
- 0028332629
- (1994) J. Microsc. , vol.173 , pp. 183
- Schwarz, U.D.¹ Haefke, H.² Reimann, P.³ Guntherodt, H.J.⁴

11
- 0028518370
- (1994) Surf. Sci. , vol.317 , pp. 321
- Odin, C.¹ Aime, J.P.² Kaadoum, Z.E.³ Bouhacina, T.⁴

12
- 0025839871
- (1991) SPIE , vol.1464 , pp. 459
- Gallarda, H.¹ Jain, R.²

13
- 0007785072
- G. S. Pingali and R. Jain, Proceedings IEEE Workshop on Applications of Computer Vision, 1992, pp. 282-289.

14
- 0028698741
- (1994) Surf. Sci. , vol.321 , pp. 287
- Villarrubia, J.S.¹

15
- 0001687110
- (1994) Microsc. Microanal. Microstruct. , vol.5 , pp. 477
- Bonnet, N.¹ Dongmo, S.² Vautrot, P.³ Troyon, M.⁴

16
- 0029208710
- (1995) Langmuir , vol.11 , pp. 265
- Wilson, D.L.¹ Kump, K.S.² Eppell, S.J.³ Marchant, R.E.⁴

17
- 0032403999
- (1998) SPIE , vol.3332 , pp. 420
- Dixson, R.¹ Koning, R.² Vorburger, T.V.³ Fu, J.⁴ Tsai, V.W.⁵

18
- 0342980198
- (1995) J. Vac. Sci. Technol. B , vol.13 , Issue.3 , pp. 1115
- Markiewicz, P.¹ Goh, M.C.²

19
- 0030289835
- (1996) J. Vac. Sci. Technol. B , vol.14 , Issue.6 , pp. 3425
- Jarausch, K.F.¹ Stark, T.J.² Russell, P.E.³

20
- 0028357446
- (1994) J. Microsc. , vol.173 , pp. 199
- Xu, S.¹ Arnsdorf, M.F.²

21
- 0030860674
- (1997) J. Microsc. , vol.187 , pp. 43
- Xu, S.¹ Arnsdorf, M.F.²

22
- 0007736611
- S. Dongmo, J. S. Villarrubia, S. N. Jones, T. B. Renegar, M. T. Postek, J. F. Song, in: D. G. Seiler, W. M. Bullis, A. C. Diebold, R. McDonald, T. Shaffner (Eds.), Characterization and Metrology for ULSI Technology, AIP Press, New York, 1998.

23
- 0000599961
- (1996) J. Vac. Sci. Technol. B , vol.14 , pp. 1557
- Williams, P.M.¹ Shakesheff, K.M.² Davies, M.C.³ Jackson, D.E.⁴ Roberts, C.J.⁵ Tendler, S.J.B.⁶

24
- 8744234038
- Also available at http://nvl.nist.gov/pub/nistpubs/jres/102/4/j24vil.pdf
- (1997) J. Res. Natl. Inst. Stand. Technol. , vol.102 , pp. 425-453
- Villarrubia, J.S.¹

25
- 0000637265
- (1996) J. Vac. Sci. Technol. B , vol.14 , pp. 1518
- Villarrubia, J.S.¹

26
- 0001365643
- (1996) J. Vac. Sci. Technol. B , vol.14 , pp. 1552
- Dongmo, S.¹ Troyon, M.² Vautrot, P.³ Delain, E.⁴ Bonnet, N.⁵

27
- 21544453647
- (1993) Appl. Phys. Lett. , vol.62 , Issue.21 , pp. 2628
- Montelius, L.¹ Tegenfeldt, J.O.²

28
- 0001489934
- (1988) Surf. Topogr. , vol.1 , pp. 303
- Song, J.F.¹

29
- 0007785073
- International Organization for Standardization, 'Guide to the Expression of Uncertainty in Measurement', Geneva, Switzerland (1993, corrected and reprinted 1995).

30
- 0007836915
- R. Revay, J. Schneir, D. Brower, J. Villarrubia, J. Fu, J. Cline, T. J. Hsieh, W. Wong-Ng, Mat. Res. Soc. Symp. Proc. Vol. 343, 1994, p. 119.

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