SCOPUS 정보 검색 플랫폼

Volumn 398-399, Issue , 2001, Pages 374-378

In-situ observation of deposition process of Pd on clean Si surfaces by ultrahigh vacuum-transmission electron microscopy/scanning tunneling microscopy

(4) Tanaka, M a Takeguchi, M a Yasuda, H a Furuya, K a

a NATIONAL INSTITUTE FOR MATERIALS SCIENCE (Japan)

Author keywords

Pd silicide; Ultrahigh vacuum scanning tunneling microscopy; Ultrahigh vacuum transmission electron microscopy

Indexed keywords

ANNEALING; DEPOSITION; PALLADIUM; SCANNING TUNNELING MICROSCOPY; SUBSTRATES; SURFACE STRUCTURE; TRANSMISSION ELECTRON MICROSCOPY; ULTRAHIGH VACUUM;

AMORPHOUS IMAGES;

SEMICONDUCTING SILICON;

EID: 0035506886 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01380-3 Document Type: Conference Paper

Times cited : (11)

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