CMOS-sealed membrane capacitors for medical tactile sensors

Journal of Micromechanics and Microengineering

Volumn 16, Issue 4, 2006, Pages 769-778

  Salo, T ^a,b   Vancura T ^a,c   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

^b VAISALA OYJ   (Finland)

^c Nanonis GmbH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; DEFLECTION (STRUCTURES); ETCHING; MEDICAL APPLICATIONS; MICROMACHINING; SENSORS; SILICON COMPOUNDS;

DIELECTRIC GAP FORMATION; FABRICATED STRUCTURES; MEMBRANE CAPACITORS;

CMOS INTEGRATED CIRCUITS;

EID: 33645054800     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/4/013     Document Type: Article

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