Electrostatic aluminum micromirrors using double-pass metallization

Journal of Microelectromechanical Systems

Volumn 6, Issue 2, 1997, Pages 126-135

  Bühler, Johannes ^b,d   Funk, Jörg ^a,b,e,f   Korvink, Jan G ^a,b,g,h,i,j   Steiner, Franz Peter ^a,b,h,k,l,m   Sarro, Pasqualina M ^a,c,n,o,p   Baltes, Henry ^{a,b,h,k,q,r,s,t,u,v,w,x,y,z}  

^a IEEE

^b ETH ZURICH   (Switzerland)

^c DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^d UNIVERSITY OF KARLSRUHE   (Germany)

^e Integrated Systems Engineering

^f SOLIDIS Development Team

^g UNIVERSITY OF CAPE TOWN   (South Africa)

^h SWISS FEDERAL INSTITUTE OF TECHNOLOGY   (Switzerland)

ⁱ MEMS Modeling Group

^j ASME   (Switzerland)

^k Swiss Electrotechnical Society ^*  (Switzerland)

^l Swiss Priority Program LESIT   (Switzerland)

^m Oerlikon Assembly Equipment AG   (Switzerland)

ⁿ UNIVERSITY OF NAPLES FEDERICO II   (Italy)

^o DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^p Brown University   (United States)

^q FREIE UNIVERSITÄT BERLIN   (Germany)

^r HEINRICH HEINE UNIVERSITY   (Germany)

^s UNIVERSITY OF WATERLOO   (Canada)

^t EPFL   (Switzerland)

^u UNIVERSITY OF ALBERTA   (Canada)

^v Alberta Microelectronic Centre   (Canada)

^w LSI Logic Corporation of Canada   (Canada)

^x Physical Electronics Laboratory   (Switzerland)

^y Swiss Federal Priority Program LESIT   (Switzerland)

^z ELECTROCHEMICAL SOCIETY   (United States)

more..

Author keywords

Deformable micromirror; Electrostatic actuator; Simulation; Surface micromachining

Indexed keywords

ACTUATORS; ALUMINUM; COMPUTER SIMULATION; ELECTROSTATICS; METALLIZING; MICROMACHINING; MIRRORS;

MICROMIRRORS;

LIGHT MODULATORS;

EID: 0031168686     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.585790     Document Type: Article

References (13)

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