CMOS-based sealed membranes for medical tactile sensor arrays

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 590-593

  Salo, T ^a   Vancura, T ^a   Brand, O ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; BIOSENSORS; CMOS INTEGRATED CIRCUITS; ETCHING; INTEGRATED CIRCUIT MANUFACTURE; METALLIZING; MICROMACHINING; ROBOT APPLICATIONS; SEMICONDUCTOR DEVICE STRUCTURES; SILICON WAFERS; SURFACES; SURGERY;

CAPACITIVE MEMBRANE STRUCTURES; MEDICAL TACTILE SENSOR ARRAYS; MINIMALLY INVASIVE CORONARY BYPASS SURGERY; SURFACE MICROMACHINING;

MEMBRANES;

EID: 0037817769     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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