CMOS-compatible device for fluid density measurements

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 278-283

  Westberg, David ^a   Paul, Oliver ^a   Andersson, Gert I ^a   Baltes, Henry ^a  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; CMOS INTEGRATED CIRCUITS; ETCHING; FINITE ELEMENT METHOD; MICROMACHINING; SEMICONDUCTOR DEVICE MANUFACTURE;

FLUID DENSITY MEASUREMENT; PIEZORESISTIVE DETECTION; RESONANT FLUID DENSITY SENSORS; THERMOMECHANICAL EXCITATION;

SILICON SENSORS;

EID: 0030645148     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)