Robust design and model validation of nonlinear compliant micromechanisms

Journal of Microelectromechanical Systems

Volumn 15, Issue 1, 2006, Pages 33-41

  Wittwer, Jonathan W ^a   Baker, Michael S ^a   Howell, Larry L ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b Department of Electrical and Computer Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; NONLINEAR CONTROL SYSTEMS; OPTIMIZATION; RESIDUAL STRESSES; ROBUSTNESS (CONTROL SYSTEMS); SENSITIVITY ANALYSIS; SIGNAL FILTERING AND PREDICTION; STIFFNESS; UNCERTAIN SYSTEMS;

EDGE BIAS; FULLY COMPLIANT BISTABLE MICROMECHANISM; MODEL VALIDATION;

MICROELECTROMECHANICAL DEVICES;

EID: 32244441862     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.859190     Document Type: Article

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