Resonating microelectromechanical structures for metrology

Materials Research Society Symposium - Proceedings

Volumn 657, Issue , 2001, Pages EE141-EE146

  Allen, A M ^a   Johnson, G C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; ETCHING; FINITE ELEMENT METHOD; MEASUREMENTS; RESONATORS;

MASS DENSITY;

MICROELECTROMECHANICAL DEVICES;

EID: 0035557593     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)

1. Electronically probed measurements of MEMS geometries
2. Round robin tests of modulus and strength of polysilicon
3. Micromechanical structures for thin film characterization
4. The additional deflection of a cantilever due to the elasticity of the support