Reproducibility data on SUMMiT

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3874, Issue , 1999, Pages 102-112

  Limary, Siv ^a   Stewart, Harold ^a   Irwin, Lloyd ^a   McBrayer, John ^a   Sniegowski, Jeffry ^a   Montague, Stephen ^a   Smith, James ^a   de Boer, Maarten ^a   Jakubczak, Jay ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUIT LAYOUT; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DEVICE TESTING; THICKNESS MEASUREMENT;

POLYSILICON MECHANICAL STRUCTURES; SURFACE MICROMACHINING; VAN DER PAUW STRUCTURES;

MICROELECTROMECHANICAL DEVICES;

EID: 0033318432     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)