Surface micromachined force gauges: Uncertainty and reliability

Journal of Micromechanics and Microengineering

Volumn 12, Issue 1, 2002, Pages 13-20

  Wittwer, Jonathan W ^a   Gomm, Troy ^a   Howell, Larry L ^a  

^a Department of Electrical and Computer Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN; FORCE MEASUREMENT; GAGES; MICROMACHINING; PROBABILITY; RELIABILITY; SURFACES;

FORCE GAUGE MODEL; FORCE UNCERTAINTY; PROBABILISTIC DESIGN; SURFACE MICROMACHINED FORCE GAUGES; UNCERTAINTY;

MICROELECTROMECHANICAL DEVICES;

EID: 0036155594     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/1/303     Document Type: Article

References (14)

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