Elimination of extra spring effect at the step-up anchor of surface-micromachined structure

Journal of Microelectromechanical Systems

Volumn 7, Issue 1, 1998, Pages 114-121

  Gill, John Jung Yeul ^a,d,e   Ngo, Lan V ^a,b,f   Nelson, Phyllis R ^c,g,h   Kim, Chang Jin ^a,i,j,k  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b WESTERN DIGITAL CORPORATION   (United States)

^c University of California   (United States)

^d UNIVERSITY OF CALIFORNIA   (United States)

^e CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^f UNIVERSITY OF CALIFORNIA   (United States)

^g RAYTHEON COMPANY   (United States)

^h Lab Phys Chim Mat L   (France)

ⁱ Seoul National University   (South Korea)

^j IOWA STATE UNIVERSITY   (United States)

^k UNIVERSITY OF TOKYO   (Japan)

more..

Author keywords

Damping; Michaelson interferometer; Step up anchor; Surface micromachining

Indexed keywords

BOUNDARY CONDITIONS; DAMPING; FINITE ELEMENT METHOD; FREQUENCY RESPONSE; INTERFEROMETERS; MICROMACHINING; NATURAL FREQUENCIES;

MICHAELSON INTERFEROMETER; SPRING EFFECTS; STEP UP ANCHORS; SURFACE MICROMACHINED BEAMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032027788     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.661393     Document Type: Article

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